First
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Publikationen vor 2023 (Archiv)
Zeitschriften/Aufsätze (reviewed)
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(2022): Nonevaporable getter-MEMS for generating UHV conditions in small volumina, Journal of Vacuum Science & Technology B
DOI: 10.1116/6.0001991 -
(2022): Detection of joining mechanisms at different locations of the wire/substrate interface during ultrasonic wire bonding via a PZT-based sensor array, Journal of Materials Processing Technology
DOI: 10.1016/j.jmatprotec.2022.117826 -
(2022): Young’s modulus and residual stresses of oxide-free wire arc sprayed copper coatings, Coatings 2022, 12(10), 1482
DOI: https://doi.org/10.3390/coatings12101482 -
(2022): Soliton compression and supercontinuum spectra in nonlinear diamond photonics, Diamond & Related Materials
DOI: https://doi.org/10.48550/arXiv.2211.00492 -
(2022): Degeneration Effects of Thin-Film Sensors after Critical Load Conditions of Machine Components, Machines 2022, 10, 870
DOI: https://doi.org/10.3390/machines10100870 -
(2022): Residual Stresses from Incremental Hole Drilling Using Directly Deposited Thin Film Strain Gauges, Experimental Mechanics
DOI: https://doi.org/10.1007/s11340-022-00822-0 -
(2022): Nanoindentation in alumina coated Al: Molecular dynamics simulations and experiments, Surface and Coatings Technology
DOI: https://doi.org/10.1016/j.surfcoat.2022.128342 -
(2022): Effect of the PEG functionalization on the saturation magnetization of magnetic nanoporous core-shell nanoparticles, International Journal on Magnetic Particle Imaging
DOI: https://doi.org/10.18416/IJMPI.2022.2203009 -
(2022): High temperature nanoindentation of iron: Experimental and computational study, Journal of Nuclear Materials 567 (2022) 153815
DOI: https://doi.org/10.1016/j.jnucmat.2022.153815 -
(2022): Impact of surface texture on ultrasonic wire bonding process, Journal of Materials Research and Technology, Volume 20, 1828-1838
DOI: 10.1016/j.jmrt.2022.07.187 -
(2021): Towards a Highly Sensitive Piezoelectric Nano-Mass Detection—A Model-Based Concept Study, MDPI Sensors
DOI: 10.3390/s21072533 -
(2021): Einfluss von Silan-dotierten Umgebungsatmosphären auf die tribologischen Eigenschaften, Tribologie und Schmierungstechnik
DOI: DOI: 10.24053/TuS-2021-0002 -
(2019): Microfabricated Magnetics on Silicon for Point of Load High Frequency Dc-Dc Converter Applications, IEEE Transactions on Industry Applications
DOI: 10.1109/TIA.2019.2921523 -
(2018): In Vitro and in vivo accumulation of magnetic nanoporous silica nanoparticles on implant materials with different magnetic properties, Journal of Nanobiotechnology 16
DOI: https://doi.org/10.1186/s12951-018-0422-6 -
(2018): Self-Cleaning Mechanisms in Ultrasonic Bonding of Al Wire, Journal of Materials Processing Technology, Vol 258 Weitere Informationen
DOI: 10.1016/j.jmatprotec.2018.03.016 -
(2018): Revealing of ultrasonic wire bonding mechanisms via metal-glass bonding, Materials Science and Engineering B: Solid-State Materials for Advanced Technology, Vol 236-237
DOI: 10.1016/j.mseb.2018.11.010 -
(2018): The Mechanism of Charge Carrier Generation at the ТiO2 - n-Si Heterojunction Activated by Gold Nanoparticles, Semiconductor Science and Technology, Vol 37(7)
DOI: 10.1088/1361-6641/aac4f3 -
(2017): Fabrication and Characterization of a Ni-Fe-W Core Microtransformer for High-Frequency Power Applications, Sensors and Actuators A
DOI: https://doi.org/10.1016/j.sna.2017.09.032 -
(2017): A silicone fiber coating as approach for the reduction of fibroblast growth on implant electrodes, Journal of Biomedical Materials Research - Part B Applied Biomaterials, Vol 105(8), 2017
DOI: 10.1002/jbm.b.33798 -
(2017): Comparative Study of Microfabricated Inductors/Transformers for High-Frequency Power Applications, IEEE Transactions on Magnetics (Volume: 53, Issue: 11, Nov. 2017) Weitere Informationen
DOI: 10.1109/TMAG.2017.2734878 -
(2017): Chip-Bonding of Low-melting Eutectic Alloys on Flexible Substrates by Transmitted Laser Radiation, Advanced Optical Technologies, 2017; Vol. 6 (3-4) Weitere Informationen
DOI: 10.1515/aot-2017-0011 -
(2017): Klimt artwork: red-pigment material investigation by backscattering Fe-57 Mössbauer spectroscopy, SEM and p-XRF, Science and Technology of Archaeological Research, Vol 3(2), 2017
DOI: 10.1080/20548923.2017.1399332 -
(2017): Investigation of intracochlear dual actuator stimulation in a scaled test rig, Current Directions in Biomedical Engineering, Vol 3(2)
DOI: 10.1515/cdbme-2017-0024 -
(2017): Feasibility of Round Window Stimulation by a Novel Electromagnetic Microactuator, BioMed Research International, Vol 2017
DOI: 10.1155/2017/6369247 -
(2016): Klimt artwork (Part II): material investigation by backscattering Fe-57 Mössbauer- and Raman- spectroscopy, SEM and p-XRF, Hyperfine Interactions, Vol 237(1), 2016 Weitere Informationen
DOI: 10.1007/s10751-016-1263-z -
(2016): Magnetic microstructure analysis of sputter deposited permalloy thin films on a spin-on polyimide substrate, Microsystem Technologies: 1-6.
DOI: 10.1007/s00542-015-2792-0 -
(2016): Flip and Fuse: A New Technique for Diffusive Coating of Organic, Flexible and Low Transition Temperature Substrates with Inorganic Materials in Roll-to-Roll Processes at Ambient Conditions, IEEE Transactions on Components, Packaging and Manufacturing Technology
DOI: 10.1109/TCPMT.2016.2580758 -
(2016): Direct hot embossing of micro-elements by means of photostructurable polyimide, Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3)
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(2016): Paper-based magnetics: Matching paper with permalloy, Springer Cellulose
DOI: 10.1007/s10570-016-1019-6 -
(2016): Longitudinal conductivity of LaF3/SrF2 multilayer heterostructures, Science and Technology of Advanced Materials
DOI: https://doi.org/10.1080/14686996.2016.1246940 -
(2015): Influence of Growth Conditions on Exchange Bias of NiMn-based Spin Valves, Journal of Applied Physics, 117, 17C108
DOI: 10.1063/1.4907231 -
(2015): Recent Developments of Magnetoresistive Sensors for Industrial Applications, Sensors, 15(11), 28665-28689
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(2015): Research Activities in the Field of Electromagnetic Energy Harvesting Micro Systems, ECS Trans 64 21
DOI: https://doi.org/10.1149/06431.0021ecst -
(2015): Eutectic bonding of integrated circuits onto polycarbonate and poly(methyl methacrylate) by means of indium-tin and indium-bismuth, IEEE Transactions on Components, Packaging and Manufacturing Technology
DOI: 10.1109/TCPMT.2015.2420531 -
(2015): Reduction of Thermomechanical Stress Using Electrically Conductive Adhesives, Energy Procedia, Volume 77, August 2015, Pages 346-355, ISSN 1876-6102
DOI: 10.1016/j.egypro.2015.07.049 -
(2014): Microtransformer with Closed Fe-Co Magnetic Core for High Frequency Power Applications, Journal of Applied Physics 115, 17A317
DOI: 10.1063/1.4863930 -
(2014): Thin-film Microtransformer for High Frequency Power Applications, AIP Journal of Applied Physics 115, 17A317
DOI: 10.1063/1.4863930 -
(2014): Dicing of Hard and Brittle Materials with On-Machine Laser-Dressed Metal-Bonded Diamond Blades, Precision Engineering Journal, Vol. 38, Issue 1, pp. 162–167
DOI: 10.1016/j.precisioneng.2013.08.007 -
(2013): Fabrication of a High Aspect Ratio (HAR) Micropillar Filter for a Magnetic Bead-based Immunoassay, Microsystem Technologies, Springer Verlag, Heidelberg, Germany
DOI: 10.1007/s00542-013-1964-z -
(2013): Fabrication of Adhesive Lenses Using Free Surface Shaping, J. Europ. Opt. Soc. Rap. Public., Vol. 8, 13065
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(2012): Design and Fabrication of a Microactuator for a Hearing Aid, Int. Journal of Applied Electromagnetics and Mechanics, Vol. 39, pp. 471-477
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(2012): Development, fabrication, and test of a modular eddy current micro sensor on a flexible polymer foil, Product Engineering Research and Development
DOI: DOI 10.1007/s11740-012-0415-5 -
(2012): Performance of an Adaptive Liquid Microlens Controlled by a Microcoil Actuator, Microfluidics and Nanofluidics, Springer Verlag, Vol. 13, Issue 2, pp 299-308
DOI: 10.1007/s10404-012-0961-3
Beiträge in Büchern (reviewed)
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(2013): (Invited) Magnetic Micro and Nano Actuator Systems, Magnetic Materials, Processes, and Devices 12, ECS Transactions Volume 50, Issue 10, The Electrochemical Society, Pennington, NJ, USA
DOI: 10.1149/05010.0119ecst -
(2011): Readout of Magnetic Tracks using Soft Magnetic Material, Abstracts Book, SMM 2011, Kos Island, Greece, p. 481
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(2011): Strukturabhängige Adaption von Waferhalter und Polierscheibe beim Chemisch-Mechanischen Polieren (CMP) von MEMS zur Verbesserung der globalen Planarität, 65. Ausgabe Jahrbuch Schleifen, Honen, Läppen und Polieren (SHLP), Vulkan Verlag,Essen, Kap. 3, S. 343-358
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(2011): (Invited) Active Magnetic Micro and Nano Electro-Mechnical Systems (MNEMS), Magnetic Materials Processes and Devices 11. ECS Transactions, Volume 33, Issue 34, The Electrochemical Society, Pennington, NJ, USA
DOI: 10.1149/1.3573588 -
(2011): Ultrapräzisionstrennschleifen von Mikrosystemen, wt Werkstattstechnik online, Springer-VDI-Verlag, Jahrgang 101 (2011) H.11/12, S.753-757
Beiträge zu Sammlungen
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(2021): Physical Sensors: Magnetic Sensors, Reference Module in Biomedical Sciences
DOI: https://doi.org/10.1016/B978-0-12-822548-6.00054-6 -
(2016): Präzisionsbearbeitung endkonturnaher Keramik im ungesinterten Zustand, Beitrag für 67. Ausgabe Jahrbuch Schleifen, Honen, Läppen und Polieren, Vulkan Verlag, Essen, 2016
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(2015): Neuartige Herangehensweise für eine Batchproduktion keramischer Mikrofräswerkzeuge., Diamond Business – Ausgabe 3.2015, S. 12-16, 2015
Bücher
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(2013): Magnetic Materials Processes and Devices 12. ECS Transactions, Volume 50, Issue 10, The Electrochemical Society, Pennington, NJ, USA
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(2011): Magnetic Materials Processes and Devices 11. ECS Transactions, Volume 33, Issue 34, The Electrochemical Society, Pennington, NJ, USA
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(1999): Mikrobearbeitung sprödharter Keramikwerkstoffe mittels Trenn- und Profilschleifen, 59. Jahrbuch Schleifen, Honen, Läppen und Polieren, Vulkan Verlag, Essen, Germany, pp. 190-204
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(1999): Thin Film Head Technologies in MEMS Applications Fabrication of a Dual Stripe MR-Sensor, Proximity, Magnetic Storage Industry Source Book, Balzers Publication, pp. 34-35
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(1995): Ultrapräzisionsbearbeitung von technischen Keramiken mittels Nanoschleifen, 58. Jahrbuch, Schleifen, Honen, Läppen und Polieren, Vulkan-Verlag, Essen, Deutschland, pp. 227-241
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(1987): Head-Media Wear in Rigid Disc Drives, Society of Tribologists and Lubrication Engineers, Tribology and Mechanics of Magnetic Storage Systems, Park Ridge, Illinois, USA, Vol. 4, pp. 116-122
Beiträge in Büchern
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(2013): Schleifscheibenkonditionierung mittels Laserstrahlung und kontaktlose Werkzeugüberwachung für die Ultrapräzisionsbearbeitung von spröd-harten Materialien, Beitrag für 66. Ausgabe Jahrbuch Schleifen, Honen, Läppen und Polieren, Vulkan Verlag, Essen, 2013 (erschienen Nov. 13)
ISBN: 9783802729713 -
(2011): Lehrbuch Mikrotechnologie : für Ausbildung, Studium und Weiterbildung (Kapitel 12: Ätzprozesse), Fachbuchverlag Leipzig im Carl-Hanser-Verlag, München
ISBN: 978-3-446-42560-6 -
(2009): Herstellung von Funktionskomponenten für den Einsatz in elektromagnetische Mikroaktoren, Tagungsband 4. Kolloquium Mikroproduktion, BIAS Verlag, Bremen, Deutschland, ISBN:978-3-933762-32-0, S. 205-210
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(2009): Focused Ion Beam Core Hole Drilling for Stress Detection in Thin-films, Microsystem Technologies, Springer Verlag Berlin, Heidelberg, New York, Vol. 15, No. 1, pp. 151-153
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(2009): Applying SU-8TM to the Fabrication of Micro Electro Discharge Machining Electrodes, Microsystem Technologies, Springer Verlag Berlin, Heidelberg, New York
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(2009): High Aspect Ratio Micromolds for the Electroplating of Micro Electro Discharge Machining Tools, Microsystem Technologies, Springer Verlag Berlin, Heidelberg, New York
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(2009): Mikrotribologie, Tagungsband 4. Kolloquium Mikroproduktion, BIAS Verlag, Bremen, Deutschland, ISBN:978-3-933762-32-0, S. 197-203
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(2009): Simulation, Herstellung und Ansteuerung von skalierbaren Mikroreluktanzmotoren, Tagungsband 4. Kolloquium Mikroproduktion, BIAS Verlag, Bremen, Deutschland, ISBN:978-3-933762-32-0, S. 191-196
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(2008): Tribological Behavior of Multilayer Diamond-like Carbon (DLC) Coatings, Göttinger Fachtagung Tribologie, Göttingen, Germany, Band I, Reibung, Schmierung und Verschleiß, ISBN 978-3-00-025676-9, 9/1-9/10
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(2008): Energieautarke Mikrosysteme in der Biomedizintechnik, Energy Harvesting, Essen, Deutschland, 2007, Expert Verlag, S. 78-87, ISBN 978-3-8169-2789-1
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(2007): Nano-Scratch Studies on Diamond-like Carbon Coatings on Various Materials Applied in Micro Actuators, GFT Tribologie-Fachtagung 2007, Göttingen, Germany, Band l, S. 28/1 - 28/10
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(2007): Modellierung des CMP-Prozesses zum Planarisieren von Mikrosystemen, SHLP 2007, Braunschweig, Deutschland, 63. Jahrbuch Schleifen, Honen, Läppen und Polieren, Vulkan Verlag, Essen, Deutschland, S. 342-361
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(2007): Lesen und Schreiben magnetischer Daten, SFB653 Kolloquium, Hannovermesse 2007, Hannover, Deutschland, S. 63-68
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(2007): Modulare, mehrfunktionale Mikrosensorik- Mikrosensoren für Kraft- und Dehnungsmessung, SFB653 Kolloquium, Hannovermesse 2007, Hannover, Deutschland, S. 19-24
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(2006): Maskless Nonlinear Lithography with Femtosecond Laser Pulses, Applied Physics A: Materials Science & Processing, Springer-Verlag GmbH, A 82, pp. 23-26, ISSN: 0947-8396
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(2005): Ausbildung von Fachkräften für die Mikrosystemtechnik, Mikrosystemtechnik, Begleitband zum Kongress 2005, Freiburg, VDE Verlag, Berlin, S. 877-880
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(2005): Magnetische Mikrosystemtechnik – klein, robust, vielseitig, Begleitband zum Hannover Kolloquium 2004, Hannover, Deutschland, S. 127-138, ISBN 3-936888-51-5
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(2005): Trenn- und Profilschleifen keramischer Mikrostrukturen, 62. Jahrbuch Schleifen, Honen, Läppen und Polieren, S. 332-341
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(2005): Herstellung polymergebundener Hartmagnete durch in SU 8 eingebrachte Magnetpulver, Mikrosystemtechnik, Begleitband zum Kongress 2005, Freiburg, VDE Verlag, Berlin, S. 581-584
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(2005): Entwicklung und Fertigung magnetischer Schichten, SFB-Kolloquium, Mainz Verlag Aachen, Germany, S. 285-293, ISBN3-86130-999-8
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(2005): Fertigung von Funktionskomponenten für elektromagnetische Mikroaktoren, SFB-Kolloquium, Mainz Verlag Aachen, Germany, S. 295-304, ISBN3-86130-999-8
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(2005): Auslegung aktiver Mikrosysteme, SFB-Kolloquium Mikroproduktion, Mainz Verlag Aachen, Germany, S. 253-262, ISBN3-86130-999-8
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(2005): Tribologie von MEMS-Komponenten, SFB-Kolloquium, Mainz Verlag Aachen, Deutschland, S. 225-232, ISBN3-86130-999-8
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(2005): Entwicklung einer magnetischen Führung für Mikroaktoren, Mikrosystemtechnik, Begleitband zum Kongress 2005, Freiburg, VDE Verlag, Berlin, S. 383-386
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(2005): Verschleißarme Beschichtungen für Mikroaktoren, Mikrosystemtechnik, Begleitband zum Kongress 2005, Freiburg, VDE Verlag, Berlin, S. 119-121
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(2004): Magnetische Mikrosystemtechnik – klein, robust, vielseitig, Begleitband zum Hannover Kolloquium 2004, Hannover, Deutschland, S. 127-138
ISBN: 3-936888-51-5 -
(2004): Chemisch-Mechanisches Polieren von Wafern für Mikrosysteme, 61. Jahrbuch Schleifen, Honen, Läppen und Polieren, Vulkan Verlag, Essen, pp. 317-329
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(2004): An Investigation on Technologies to Fabricate Microcoils for Miniaturized Actuator Systems, Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol.10, No. 3, pp.175-185
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(2003): Submikrometerschichten für mikrotribologische Anwendungen, SFB-Kolloquium, Vulkan Verlag Braunschweig, S. 75-83
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(2003): Grenzschichtuntersuchungen an schnelllaufenden fettgeschmierten Schrägkugellagern, GFT Tribologie Fachtagung 2003, Band 2, Göttingen
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(2002): Minimierung der Schnittbreite beim Trennschleifen von Wafern, 60. Jahrbuch Schleifen, Honen, Läppen und Polieren, Vulkan-Verlag, Essen, pp. 301-309
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(2000): Korrelation mikrotribologischer Eigenschaften mit dem makroskopischen Reibungsverhalten am Beispiel von Synchronisierungen, Proc. 12th Int. Colloquium Tribology 2000-Plus, Stuttgart, Tribologie und Schmierungstechnik, S. 13-17
Vortrag
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(2009): Concepts for the Apprenticeship and Advanced Training in Microtechnology, Sensor und Test 2009, Nuremberg, Germany
Konferenz (reviewed)
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(2022): Approaches for a Solely Electroless Metallization of Through-Glass Vias, 2022 IEEE 72nd Electronic Components and Technology Conference (ECTC)
DOI: 10.1109/ECTC51906.2022.00145 -
(2022): Production and characterisation of batch manufactured flexible micro-grinding tools for finishing metallic surfaces, euspen's 22nd International Conference & Exhibition 2022
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(2022): Monitoring of the flange draw-in during deep drawing processes using a thin-film inductive sensor, 12. Kongress der deutschen WPG - Wissenschaftliche Gesellschaft für Produktionstechnik, Stuttgart, Germany, October 2022
DOI: 10.1007/978-3-031-18318-8_12 -
(2022): In Situ Resistance Trimming of Directly Deposited Thin-Film Strain Gauges, IEEE Sensors 2022
DOI: 10.1109/SENSORS52175.2022.9967357 -
(2022): Influence of oxide layers on plastic deformability of copper, 7th World Tribology Congress 2022
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(2022): Batch Fabrication of Silicon Indenter Tips for adhesion investigations using Deep Reactive Ion Etching (DRIE), Nanobrücken 2022 - Nanomechanical Testing Conference
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(2021): Proof of Concept: Glass-Membrane Based Differential Pressure Sensor, 2021 IEEE 71st Electronic Components and Technology Conference (ECTC)
DOI: DOI 10.1109/ECTC32696.2021.00248 -
(2021): Anisotropic Magneto-Resistive Effect based Sensor using Daisy Chain on Polyether Ether Ketone Substrate, IEEE Sensors 2021
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(2021): Investigations on Silver Sintering using an Ultrasonic Transient Liquid Phase Sintering Process, IEEE Electronics Packaging Technology Conference (EPTC)
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(2020): Novel Piezoelectric Force Sensor Array for Investigation of Ultrasonic Wire Bonding, IEEE 70th Electronic Comp. and Techn. Conf. (ECTC)
DOI: 10.1109/ECTC32862.2020.00053 -
(2020): Giant Magneto-Resistive Effect based Sensor on Laser Direct Structured MID Substrates, IEEE 70th Electronic Comp. and Techn. Conf. (ECTC)
DOI: 10.1109/ECTC32862.2020.00077 -
(2020): Direct Deposition of Thin-Film Strain Gauges with a New Coating System for Elevated Temperatures, IEEE Sensors 2020
DOI: 10.1109/SENSORS47125.2020.9278661 -
(2020): Einfluss von Silan-dotierten Umgebungsatmosphären auf die tribologischen Eigenschaften von Titan, 61. Tribologie-Fachtagung 2020
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(2020): Optical Platform for Highly Precise Optical Components, IEEE 70th Electronic Comp. and Techn. Conf. (ECTC)
DOI: 10.1109/ECTC32862.2020.00341 -
(2020): Passive and Active Thermal Management of Bonded Bare-Dice Laser Diodes on Polymer Foil Substrates, 2020 IEEE Photonics Conference (IPC)
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(2020): Thin Film Transferring via PVA Substrate and Contacting of Sensor inside Elastomer Matrix, IEEE Sensors 2020
DOI: 10.1109/SENSORS47125.2020.9278876 -
(2020): Mikrotechnologische Fertigung von integrierten optischen Gittern für den Einsatz in Atominterferometern, Mikro-Nano-Integration - 8. GMM-Workshop, 2020
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(2020): Transfer Printing of Conductive Thin Films on PDMS with Soluble Substrates for Flexible Biosensors, 7th International Electronic Conference on Sensors and Applications (ECSA)
DOI: 10.3390/ecsa-7-08181 -
(2019): Novel Eddy-Current Sensor For Industrial Deep-Drawing Applications, IEEE Sensors 2019
DOI: 10.1109/SENSORS43011.2019.8956948 -
(2019): Structuring of Laser Activated Polymers for Sensor Applications, IEEE 69th Electronic Components and Technology Conference (ECTC)
DOI: 10.1109/ECTC.2019.00290 -
(2019): Vibro-tactile displays for stimulating surface impressions, Proceedings of the 23rd International Congress on Acoustics
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(2018): Flexible mono- and multilayer micro grinding tools for ultra-high precision processing and micro machining, 18th International Conference & Exhibition proceedings, pp. 151-152, Venedig, Italien, June 2018
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(2018): Structuring Methods of Polymers for Low Cost Sensor Manufacturing, IEEE 68th Electronic Components and Technology Conference (ECTC) | Datei | Weitere Informationen
DOI: 10.1109/ECTC.2018.00213
ISBN: 978-1-5386-4999-2 -
(2018): Integrated Atomic Quantum Technologies in Demanding Environments: Development and Qualification of Miniaturized Optical Setups and Integration Technologies for UHV and Space Operation, International Conference on Space Optics 2018, ICSO 2018
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(2018): Magnetic Properties of Thermal Sprayed Tungsten Carbide-Cobalt Coating, Advanced Engineering Materials 20 (9)
DOI: 10.1002/adem.201800102 -
(2018): Grinding of riblets with “beaver tooth” multi-layer tools, 4th CIRP Conference on Surface Integrity, Tianjin, China, Juli 2018
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(2018): Fabrication and characterization of high-speed PZT sensors for the investigation of ultrasonic wire bonding process, euspen’s 18th International Conference & Exhibition
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(2018): Visualization of Oxide Removal during Ultrasonic Wire Bonding Process, IEEE Electronics Packaging Technology Conference (EPTC), Singapore, p. 1-4
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(2018): Concept for Using MID Technology for Advanced Packaging, IEEE 68th Electronic Components and Technology Conference (ECTC)
DOI: 10.1109/ECTC.2018.00143 -
(2018): Mode-selective polished fiber couplers based on fiber gratings, The Optical Fiber Communication Conference and Exhibition (OFC) Weitere Informationen
DOI: 10.1364/OFC.2018.Th1K.6
ISBN: 978-1-943580-38-5 -
(2018): Solid State Joint Actuator for a Vibro Tactile Line Display, ACTUATOR 2018, 16th International Conference on New Actuators, Bremen Weitere Informationen
ISBN: 978-3-8007-4675-0 -
(2017): Modeling and Characterization of a Bimodal Tactile Display, International Workshop on Piezoelectric Materials and Applications in Actuators (IWPMA)
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(2017): Electrical feed through for tool integrated high temperature applications, International Conference and Exhibition on Integration Issues of Miniaturized Systems 2017, SSI 2017
ISBN: 978-395735057-2 -
(2017): Press hardening tool integrated thin film temperature sensor, Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017
ISBN: 978-099577510-7 -
(2017): A micromechanical gyroscope with bistable suspension of microdrive, Proceedings of 24th Saint Petersburg International Conference on Integrated Navigation Systems (ICINS)
DOI: 10.23919/ICINS.2017.7995646 -
(2017): Analysis of the Wire/Substrate Interface during Ultrasonic Bonding Process, IEEE CPMT Symposium Japan (ICSJ), Kyoto, Japan, p. 203-206
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(2017): Investigations on the oxide removal mechanism during ultrasonic wedge-wedge bonding process, Proceedings of the 2016 IEEE 18th Electronics Packaging Technology Conference, EPTC 2016
DOI: 10.1109/EPTC.2016.7861512
ISBN: 978-150904368-2 -
(2017): A micromechanical gyroscope with bistable suspension of microdrive, Proceedings of 24th Saint Petersburg International Conference on Integrated Navigation Systems (ICINS)
DOI: 10.23919/ICINS.2017.7995646 -
(2017): Modeling and Characterization of a Bimodal Tactile Display, International Workshop on Piezoelectric Materials and Applications in Actuators (IWPMA)
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(2016): Structuring Methods of Plastic Substrates for Electroplating Applications, 229th ECS Meeting, San Diego, 2016
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(2016): Development and Optimization of Thin-Film Technology Based Micro Inductors and Transformers, ECS Trans. 2016 volume 75,issue 2, 51-58 Weitere Informationen
DOI: 10.1149/07502.0051ecst -
(2016): An application report: Protective thin film layers for high temperature sensor technology, Proceedings of the 2016 IEEE North West Russia Section Young Researchers in Electrical and Electronic Engineering Conference, EIConRusNW 2016
DOI: 10.1109/EIConRusNW.2016.7448110
ISBN: 978-150900445-4 -
(2016): Stress Reduction in sputtered thin NiFe 81/19 layers for Magnetic Field Sensor, 3rd International Conference on System-integrated Intelligence: New Challenges for Product and Production Engineering, SysInt 2016, Procedia Technology 26, pp. 162-168 Weitere Informationen
DOI: 10.1016/j.protcy.2016.08.022 -
(2016): Development of a Humidity Sensor Element based on sputter-deposited Thin ZnO-Layers, 3rd International Conference on System-integrated Intelligence: New Challenges for Product and Production Engineering, SysInt 2016, Procedia Technology 26, pp. 27-34 Weitere Informationen
DOI: 10.1016/j.protcy.2016.08.005 -
(2016): Concept Development and Evaluation of a hermetically sealed Ceramic Package, International Conference and Exhibition on Integration Issues of Miniaturized Systems (SSI2016), München, pp. 413-416
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(2016): Investigation for thinning-by-dicing of sintered and unsintered ceramics, 16th International Conference & Exhibition proceedings, pp. 325-326, Notthingham, June 2016
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(2016): Flexible Magnetic Reading/Writing System: Heat-Assisted Magnetic Recording, 3rd International Conference on System-integrated Intelligence: New Challenges for Product and Production Engineering, SysInt 2016, Procedia Technology 26, pp. 72-78 Weitere Informationen
DOI: 10.1016/j.protcy.2016.08.011 -
(2016): Flexible Magnetic Reading/Writing System: Characterization of a Read/Write Head, 18. GMS/ITG-Fachtagung Sensoren und Messsysteme (SUM2016), Nürnberg, pp. 769-775 Weitere Informationen
DOI: 10.5162/sensoren2016/P8.1 -
(2015): Investigation of Electrodeposited NIFeMo for Applications as Flux Condensator in Magnetic Field Sensors, ECS Trans., Vol. 64, Issue No. 31, Magnetic Materials, Processes, and Devices 13, pp. 11-19
DOI: 10.1149/06431.0011ecst -
(2015): A Comparative Study of Saturation Induction with Current Density of Electrodeposited Fe-Ni-W Alloys, ECS Trans., Vol. 64, Issue No. 31, Magnetic Materials, Processes, and Devices 13, pp. 75-83
DOI: 10.1149/06431.0075ecst -
(2015): Improved Microtransformer Design Utilizing Fe-Co Magnetic Core, 20th Int. Conf. on Magnetism (ICM 2015), Elsevier, Physics Procedia, Vol. 75, pp. 1252-1258
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(2015): Smart System Integration: Moulding of Magnetic Field Sensors into AlSi9Cu3(Fe)-Alloys, SMTA Pan Pacific Microelectronics Symposium, Kauai, HI, USA
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(2015): Verwendung von Schattenmasken zur Direktstrukturierung individuell adaptierbarer Sensorik auf technischen Oberflächen, MST Kongress 2015, Karlsruhe, 26. - 28. Oktober 2015, pp. 338-341
ISBN: 978-3-8007-4100-7 -
(2015): Hybrider Fertigungsprozess zur Integration von Drucksensoren auf die Oberfläche von Tellerfedern, MST Kongress 2015, Karlsruhe, 26. - 28. Oktober 2015, pp. 563-566
ISBN: 978-3-8007-4100-7 -
(2015): Impact of different polyimide-based substrates on the soft magnetic properties of NiFe thin films, SPIE Microtechnologies (pp. 95171R-95171R). International Society for Optics and Photonics
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(2015): Vertical Interconnect Access (VIA) in Technical Porcelain for MEMS, Smart System Integration, Copenhagen, proceedings 2015, pp. 461-465
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(2015): Hybrid packaging of circuits and devices onto flexible screen printed electrical interconnects, SMTA Pan Pacific Microelectronics Symposium, Kauai, HI, USA
DOI: 10.13140/RG.2.1.2064.9763/1 -
(2015): Paper-based spintronics: magneto-resistivity of permalloy onto paper substrates, 65th IEEE Electronic Components and Technology Conference, San Diego, USA
arXiv: http://arxiv.org/abs/1503.04853 -
(2015): Examination of friction and wear of a 100Cr6 ball against a bearing ring in a micro-pin-on-disk tester, WIT Transactions on Engineering Sciences, Vol 91: 57 - 68
DOI: 10.2495/SECM150051 -
(2015): Flexibles magnetisches Lese-/Schreibsystem: Design eines Schreibkopfes, MST Kongress 2015, Karlsruhe, 26. - 28. Oktober 2015, pp. 684-687
ISBN: 978-3-8007-4100-7 -
(2015): Influence of Deposition Parameters on Mechanical Stress and Magnetic Properties in Thick, Electroplated Co-Fe Flux Guides, ECS Trans., Vol. 64, Issue No. 31, Magnetic Materials, Processes, and Devices 13, pp. 33-38
DOI: 10.1149/06431.0033ecst -
(2015): Optodic bonding of optoelectronic components in transparent polymer substrates-based flexible circuit systems, Proc. SPIE 9366, Smart Photonic and Optoelectronic Integrated Circuits XVII, 936609 (February 27, 2015)
DOI: 10.1117/12.2077072 -
(2014): Thin film fabrication of highly sensitive earth magnetic field sensor, Tagungsband Smart Systems Integration 2014, 8th International Conference & Exhibition on integration issues of miniaturized systems - MEMS, NEMS, ICs and electronic components 2014, pp. 595–598
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(2014): Relationship between Thermal Stability and Layer-stack/structure of NiMn-based GMR Systems, IEEE Transactions on Magnetics, Vol. 51, NO. 1
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(2014): Integrierte Sensorik für Hochtemperaturumgebungen, GMM, VDI/VDE-IT (eds) Tagungsband: MikroSystemTechnikKongress 2013. Von Bauelementen zu Systemen, 14.-16. Oktober 2013 in Aachen, pp. 555–558
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(2014): Material-inherent data storage using magnetic magnesium-cobalt alloys, Procedia Technology, Vol. 15, 2014, pp. 187-196, Bremen, Germany,
DOI: 10.1016/j.protcy.2014.09.071 -
(2014): Investigations on the Separation of Platinum Nanoparticles with Magnetic Beads, IEEE Transactions on Magnetics, Vol. 50, Issue 11
DOI: 10.1109/TMAG.2014.2323306 -
(2014): Thin Film Fabrication and System Integration Test Run for a Microactuator for a Tuneable Lens, Proc. SPIE 8973, Micromachining and Microfabrication Process Technology XIX, 897305, San Francisco, USA
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(2014): Component Integrated Sensors: Deposition of Thin Insulation Layers on Functional Surfaces, Procedia Technology, Vol. 15, pp. 114–121
DOI: 10.1016/j.protcy.2014.09.062 -
(2014): Soft Magnetic Properties of Permalloy Thin Films on Polyimide-based Substrates, 10th European Conference on Magnetic Sensors and Actuators 2014, Vienna, July 6-9 2014
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(2014): Investigations on Strain Behaviour of Polymer Substrates during a Separation Process, 2nd International Conference on System-Integrated Intelligence: Challenges for Product and Production Engineering, Procedia Technology, Vol. 15, 2014, pp. 221–229
DOI: 10.1016/j.protcy.2014.09.075 -
(2014): Magnetic MEMS, Semicon Russia 2014, St. Petersburg, St. Petersburg State Polytechnical University Journal 5 (205), pp. 21-35
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(2014): A Hybrid Concept as a new Approach for the Micro-Production of Magnetic Actuators, Symposium on Automated Systems and Technologies AST, St. Petersburg, Russia, PZH-Verlag, Berichte aus dem ITA, pp. 89-93, Band4/2014
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(2014): Direct hot embossing of micro-elements by means of UV-structurable polyimide, MNE 2014, Lausanne, CH, September 22-26
DOI: 10.13140/2.1.1919.1367 -
(2014): Design Guidelines for Efficient eutectic soldering onto low Tg polymeric multimode light waveguides, 2nd Int. Conf. SysInt 2014, Bremen, Germany, pp. 167-176
DOI: 10.1016/j.protcy.2014.09.069 -
(2014): Enabling Eutectic Soldering of 3D Opto-Electronics onto Low Tg Flexible Interposers, Proceedings of 64th IEEE ECTC, Florida, pp. 1595-1600,
DOI: 10.1109/ECTC.2014.6897507 -
(2014): Normal force actuator for a tactile display using normal and shear forces to perform haptic skin stimulation, MNE 2014, Lausanne, CH
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(2014): Ultra-precision Manufacturing of Porcelain-based MEMS, Proc. 8th Int. Conf. & Exh. on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components, Vienna 2014, Vienna, Austria, pp. 573-577
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(2014): Flexible Magnetic Writing / Reading System: Polyimide Film as Flexible Substrate, Procedia Technology, Vol. 15, 2014, pp. 230–237
DOI: 10.1016/j.protcy.2014.09.076 -
(2014): Optimization of Mechanical and Magnetic Properties in High, Electroplated Co-Fe-Flux Guides, IEEE Transactions on Magnetics, Vol. 50, NO. 4
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(2014): Integration of PVDF (Polyvinylidene Fluoride) in MEMS Production, ECS Trans. 2014 64(1): 189-195
DOI: 10.1149/06401.0189ecst -
(2013): Development, Micro Fabrication and Test of Flexible Magnetic Write Head for Gentelligent Applications, Microelectronic Engineering Journal, (spec. issue), Proc. 38th Int. Conf. on Micro & Nanoengineering, Toulouse, France
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(2013): High permeability flexible bulk material for magnetic micro head applications, JEMS 2012, EPJ Web Conferences, Volume 40, Parma, Italy
DOI: 10.1051/epjconf/20134016003 -
(2013): Fabrication of Paper-based Microfluidic Devices with Stamps, 39th Int. Conf. on Micro- and Nanoengineering (MNE), London, UK, Book of abstracts, p. 84
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(2013): Fabrication of a High Aspect Ratio (HAR) Micropillar Filter for a Magnetic Bead-based Immunoassay, HARMNST2013, Berlin, Book of Abstracts pp. 124-125
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(2013): Mikrofluidische Partikelmanipulation mit elektrischen Feldkräften, Proc. Mikrosystemtechnik-Kongress (MST2013), Aachen, Deutschland, VDE Verlag GmbH, pp. 399-402
ISBN: 978-3-8007-3555-6 -
(2013): Thin-film Microtransformer for High Frequency Power Applications, Joint European Magnetic Symposia 2013 (JEMS), Rhodos, Greece, p. 153
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(2013): Design und Prozessfolge zur Herstellung eines elektromagnetischen Mikroaktors zur Erzeugung einer Flüssigkeitslinse für den Einsatz in einem Mikroskop, Mikrosystemtechnik-Kongress (MST 2013), Aachen, Deutschland, pp. 500-503
ISBN: 978-3-8007-3555-6 -
(2013): Thin Film Fabrication and System Integration Test Run for a Microactuator for a Tuneable Lens, Proc. SPIE Photonics West 2013, San Francisco, USA
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(2013): Design, Simulation and Fabrication Sequence of an Electromagnetic Microactuator for a Liquid Lens, M3-19, soft magnetic materials conference 2013
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(2013): Investigations on the Removal Mechanisms of Diverse Alumina Based Polishing Slurries for Chemical Mechanical Polishing of Electro-plated NiFe 45/55, Microelectronic Engineering Journal, (spec. issue), Proc. 38th Int. Conf. on Micro & Nanoengineering, Toulouse, France
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(2013): Fertigung eines Mikroaktors zur Manipulation von Nanopartikeln auf einem Glassubstrat, Mikrosystemtechnik-Kongress (MST 2013), Aachen, Deutschland, pp. 496-499
ISBN: 978-3-8007-3555-6 -
(2013): Dicing study for high productive micro production of porcelain-based ceramic for MEMS, Proc.13th euspen Int. Conf., Berlin, Germany, pp. 92-95
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(2013): Dicing concept for mechanical structured materials and multi-layer-speciems, Proc. 13th euspen Int. Conf., Berlin, Germany, pp.88-91
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(2013): Optimization of mechanical and magnetic properties in high, electroplated Co-Fe-flux guides, Soft Magnetic Materials Conference 2013 (SMM 2013), Budapest, Ungarn
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(2013): Technology Development for Packaging of the GMR-Sensor via Eutectic Bonding, Smart System Integration SSI 2013, paper 107, Amsterdam, The Netherlands
ISBN: ISBN 978-3-8007-3490-0 -
(2013): New Concept of integrating Nanowires in Technical Devices by Anodization of Aluminium, Proc. 13th euspen Int. Conf., Berlin, Germany, pp. 323-326
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(2013): Investigations on Eutectic Bonding of Polyimide Structures for MEMS Applications, Smart System Integration (SSI 2013), paper 106, Amsterdam, The Netherlands
ISBN: 978-3-8007-3490-0 -
(2012): Surface Preparation for Sensing the Kerr-effect on NiFe81/19 Layers, Proc. 12th euspen Int. Conf. 2012, Stockholm, Sweden, pp. 279-282
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(2012): Integration of the Read-after-write Method for GentelligentTM Applications, 1st Joint International Symposium on System-Integrated Intelligence (Sysint 2012), Hanover, Germany, pp. 49-51
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(2012): Optical and Mechanical Properties of a Polyimide Membrane for Tunable Lenses, Proc. SPIE, 8489, Polymer Optics and Molded Glass Optics: Design, Fabrication and Materials II, 84890F
DOI: 10.1117/12.929773 -
(2012): Thermal and Magneto-optical Characterization of Optimized Stator Systems for a Ferrofluidic Microactuator, Proc. 13th Int. Conf. Actuator, Bremen, Germany, pp. 693-695
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(2012): System Integration of a Ferrofluidic Microactuator, Tagungsband Fünfter Workshop Optische Technologien – HOT 2011, Hanover, Germany, pp. 135-139
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(2012): Designs and Characterizations of Soft Magnetic Flux Guides in a 3D magnetic field sensor, IEEE Transaction on Magnetics, Vol. 48, No. 4, pp. 1481-1484
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(2012): Integration of Electroplated CoFe in Trench Type Flux Guides for Magnetic MEMS Applications, Trans. 222nd ECS Meeting, Honolulu, Hawaii, Vol. 50, No. 10, pp. 157-166
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(2012): Slurry Comparison for Chemical-mechanical Polishing (CMP) of Silicon Carbide (SiC), Proc. 12th euspen Int. Conf. 2012, Stockholm, Sweden, pp. 145-148
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(2012): Electroplating of Cu/Sn Layers for Hermetic Encapsulation for Vacuum Applications, Trans. 222nd ECS Meeting, Honolulu, Hawaii, Vol. 50, No. 10, pp. 207-216
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(2012): Separation of Magnetic Nano Beads by Using Soft Magnetic Flux Concentrators, Trans. 222nd ECS Meeting, Honolulu, Hawaii, 50, No. 10, pp. 263-270
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(2012): Embossing of Soft-magnetic Structures and Influence on Magnetic Properties, Trans. 222nd ECS Meeting, Honolulu, Hawaii, Vol. 50, No. 10, pp. 189-197
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(2012): Concept for Performance-Enhancement of Ultra-Precision Dicing for Bulk Hard and Brittle Materials in Micro Applications by Laser Dressing, Microelectronic Engineering Journal (spec. issue), Proc. 37th Int. Conf. on Micro & Nanoeng., Berlin, Germany, Vol. 98, pp. 544-547
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(2012): Ultra-precision Dicing Process Separation: Effect of Circumferential and Sidewall Grinding, Proc. 12th euspen Int. Conf. 2012, Stockholm, Sweden, pp. 169-172
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(2012): Dressing Criteria for Inline Laser Dressing of Metal-bonded Dicing Blades, Proc. 12th euspen Int. Conf. 2012, Stockholm, Sweden, pp. 201-204
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(2012): Investigation of the Crystallization of FiFe81/19 Depending on the Annealing Temperature, Trans. 222nd ECS Meeting, Honolulu, Hawaii, Vol. 50, No. 10, pp. 147-156
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(2012): Thinning Process Optimization for an Ultra-thin 3D Magnetic Field Sensor, Smart Systems Integration (SSI 2012), 6th Int. Conf. & Exhibition, Zurich, Swiss, paper 17
ISBN: 978-3-8007-3423-8 -
(2011): Redesign and Fabrication of a Magnetic Head for GentelligentTM Products, 11th Euspen International Conf. 2011, Como, Italy, 2011
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(2011): Investigations on Micromolds for Dispensing Low Viscosity Epoxies for MEMS Applications, ECS Transactions, Vol. 33, Issue 34, Magnetic MEMS and Devices, pp. 81-92
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(2011): Investigations on Silicon Nitride Thin Films Deposited be PECVD, European Congress and Exhibition on Advanced Materials and Processes (Euromat 2011), Montpellier, France, 2011
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(2011): Soft Magnetic Thin Films for MEMS Applications, European Congress and Exhibition on Advanced Materials and Processes (Euromat 2011), Montpellier, France, 2011
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(2011): Simulation for Optimization of a Ferrofluidic Microactuator, Tagungsband Vierter Workshop Optische Technologien – HOT 2010, Hanover, Germany, pp. 310-314, 2011
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(2011): Characterization of a Stator System for a Ferrofluidic Microactuator and Design Optimization, Proc. of Smart System Integration 2011, Dresden (2011)
ISBN: 978-3-8007-3324-8 -
(2011): Einsatz elektromagnetischer Antriebe in fluidischen Systemen, 5. Kolloquium Mikroproduktion, Karlsruhe, Deutschland, 2011
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(2011): Konzept und Fertigung von Komponenten eines ferrofluidischen Mikroaktors, Mikrosystemtechnik-Kongress (MST2011), Darmstadt, Deutschland, 2011
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(2011): Precision Grinding with CVD Diamond Coated Dicing Blades, 11th Euspen International Conf. 2011, Como, Italy, 2011
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(2011): Microtribological Evaluation of Unlubricated Sliding Bearings with Thin Si3N4 and PTFE Coatings, 18th Int. Conf. Wear of Materials. 3rd European Conf. on Tribology (ECOTRIB2011), Vienna, Austria, 2011, Vol. 2, pp. 747-752
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(2011): Investigations on Sliding Bearings for Mirco Actuators, Proc. 11th Euspen International Conf. 2011, Como, Italy, pp. 72-75, 2011
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(2011): Considerations on Ultra-thin Substrateless Micro and Nano Systems, Proc. ASME2011 & Exp. IMECE2011, Denver, CO, USA, 2011
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(2011): Fertigung und Charakterisierung hartmagnetischer Dünnfilmschichten, Mikrosystemtechnik-Kongress (MST2011), Darmstadt, Deutschland, 2011
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(2011): Sputtering of SmCo Thin Films and Integration into a Ferrofluidic Microactuator, IEEE International Magnetics Conf. (Intermag 2011), Taipei, Taiwan, 2011
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(2011): Component-Integrated Sensors and Communication for Gentelligent Devices, Proc. IEEE Int. Conf. on Industrial Engineering and Engineering Management, Singapore, pp. 499-503
DOI: 10.1109/IEEM.2011.6117967 -
(2011): Mikroaktor zur Manipulation von Nanopartikeln zum Gentransfer, Mikrosystemtechnik-Kongress (MST2011), Darmstadt, Deutschland, 2011
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(2011): Mechanical Characterization of Machining Results for Sintered Silicon-Carbide (SSiC), Proc. 11th Euspen International Conf. 2011, Como, Italy, pp. 357-360, 2011
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(2011): Blade Wear and Sidewall Quality by Dicing of Sintered Silicon Carbide (SSiC), Proc. 11th Euspen International Conf. 2011, Como, Italy, pp. 333-336, 2011
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(2011): Planarization of Refrigerated Material Composites for MEMS, Proc. 11th euspen Int. Conf. 2011, Como, Italy, pp. 188-191
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(2011): Herstellung eines Mikroaktors zur Anregung der Perilymphe bei Schwerhörigkeit, Mikrosystemtechnik-Kongress (MST2011), Darmstadt, Deutschland, 2011
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(2011): Application of Sacrificial Layers fort he Modular Micro Sensor Fabrication on a Flexible Polymer Substrate, Proc. CD, Sensor + Test Conf. 2011 – Sensor, Opto, IRS2, Nuremberg, Germany
ISBN: 978-3-9810993-9-3 -
(2011): Modular Eddy Current Micro Sensor, IEEE International Magnetics Conf. (Intermag 2011), Taipei, Taiwan, 2011
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(2011): Design and Fabrication of a Modular Eddy Current Micro Sensor, Proc. 29th Progress In Electromagnetics Research Symposium (PIERS 2011), Marrakesh, Morocco, pp. 752-755, 2011
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(2010): A Programm to Attract Females to Hightech Fields like Nanotechnology and Optics, Proc. CD, IAMOT 2010, Cairo, Egypt, 2010
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(2010): Simulation of an Improved Microactuator with Discrete MSM Elements, Materials Science Forum Vol. 635, pp. 181-186, Trans Tech Publications, Switzerland, 2010
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(2010): Using Magnetooptical Measurements for the Evaluation of a Hybrid Magnetic Shape Memory (MSM) Based Microactuator, Transactions on Magnetics, Vol. 46, Issue 6, pp. 2256-2259, 2010
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(2010): Evaluation of a Slider with an Integrated Magnetic Mircroactuator Using Laser Doppler Vibrometry, Proc. 12th Int. Conf. on New Actuators 2010, Bremen, Germany, pp. 774-777, 2010
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(2010): Design, Modeling and Fabrication Sequence of a Ferrofluidic Microactuator, Proc. 12th Int. Conf. on New Actuators 2010, Bremen, Germany, pp. 361-364, 2010
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(2010): System Integration Challenges for a Slider with an Integrated Microactuator, Transactions on Magnetics, Vol. 46, Issue 6, pp. 2163-2166, 2010
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(2010): Micro Electro Discharge Machining (μEDM) with Novel Tool Electrodes, Proc. 16th ISEM 2010, Press Shanghai Jiaotong University Press, ISBN 9787313056306, pp.577-582, Shanghai, China, 2010
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(2010): Fabrication and Tribological Investigation of Fullerene C60/C70 Reinforced Epoxy Resin SU-8TM, Tagungsband, Tribologie-Fachtagung, Göttingen, Germany, 2010
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(2010): Electromagnetic Micro and Nano Actuators, Proc. 12th Int. Conf. on New Actuators 2010, Bremen, Germany, pp.346-351, 2010
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(2010): Second Stage Actuation for Hard Disc Drives through MEMS Technology, IEEE Transactions on Magnetics, Vol. 46, No. 3, pp. 782- 789, 2010
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(2010): Methodology for Concurrent Nano-Engineering. Proc. CD, IAMOT 2010, Cairo, Egypt, 2010, Proc. CD, IAMOT 2010, Cairo, Egypt, 2010
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(2010): Applying SU-8TM to the Fabrication of Micro Electro Discharge Machining Electrodes, Microsystem Technologies, Springer Verlag, Berlin, Heidelberg, New York, Vol. 16, No. 8-9, pp. 1445-1450, 2010
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(2010): Fabrication of Electroplated Cu Tool Electrodes for μ-EDM using a Si Micromold, Proc. EUSPEN 2010, Delft, The Netherlands, pp. 355-358, 2010
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(2010): High Aspect Ratio Micromolds for the Electroplating of Micro Electro Discharge Machining Tools, Microsystem Technologies, Springer Verlag, Berlin, Heidelberg, New York, Vol. 16, No. 8-9, pp. 1377-1383, 2010
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(2010): Creating Solid State Micro Joints through Micro Machining, Proc. EUSPEN 2010, Delft, The Netherlands, pp. 189-192, 2010
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(2010): Magneto-optical Characterization of the Stator of a Variable Reluctance (VR) Micro Step Motor, Proc. 12th Int. Conf. on New Actuators 2010, Bremen, Germany, pp. 706-709, 2010
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(2010): Optimization of the Magnetic Performance of a Linear Variable Reluctance (VR) Micro Step Motor, Digests, 11th Joint MMM-Intermag Conf. 2010, Washington, DC, USA, 2010
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(2010): Mechanical and Thermal Simulations of a Microactuator for the Simulation of the Perilymph, Proc. CD, EuroSimE 2010, Bordeaux, France, 2010
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(2010): Simulations of an Electromagnetic Microsystem used in Biomedical Applications, Proc. CD, Piers 2010, Xi’an, China, 2010
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(2009): Mikro-Hysteresemesssensor zur Vermessung anisotroper Dünnfilme. Micro Hysteresis Sensor for Measuring Anisotropic Thin-Films, Proc. MST-Kongress 2009, Berlin, Deutschland, S. 389-392
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(2009): A Pladoyer for a Concurrent Nano Engineering, Proc. COMS 2009, 14th Ann. Meet., Conf. CD, Copenhagen, Denmark
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(2009): Controlling Nanoparticle Complexes in Gene Delivery Applications, Book of Abstracts, 1st Symposium of the SFB/TR 37, Aachen, Germany, pp.30
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(2009): Application of Electroplated Electrodes in Micro Electro Discharge Machining (EDM), Proc. euspen 9th Int. Conf. 2009, San Sebastian, Spain, Vol. 2, pp. 471-474
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(2009): Evaluation of a Concept for Professional Improvement by Study in Engineering Sciences, Proc. IAMOT, 18th Int. Assoc. for Manag. of Tech., Orlando, Fl., USA, Conf. CD, ISBN 0-9815817-2-2
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(2009): Resistance of Multilayer Diamond-like Carbon (DLC) Coatings for MEMS Applications against Oscillating Wear, Proc. WTC 09, Kyoto, Japan, G-114, pp.112
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(2009): Dünnfilmtechnische Herstellung eines rotierenden Synchronmotors. Thin-film Fabrication of a Rotating Synchronous Motor, Proc. MST-Kongress 2009, Berlin, Deutschland, S. 828-831
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(2009): Aktivteil eines Schreib-/Lesekopfes mit integriertem Mikroaktor (SLIM) für Festplattenspeicher. Active Part of a Read/Write Head with an Integrated Microactuator for Hard Disc Drives (HDD), Proc. MST-Kongress 2009, Berlin, Deutschland, S. 262-265
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(2009): Magnetic Micro Sensor Activities at the Leibniz University Hanover, Sensor und Test 14th Int. Conf. 2009, Nuremberg, Germany, Vol. 2, A6.4, pp. 35-40, ISBN 978-3-9810993-5-5
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(2009): Magnetische Mikrosysteme für Wandleranwendungen. Magnetic Micro Electro-mechanical Systems (MEMS) for Transducer Applications, Proc. MST-Kongress 2009, Berlin, Deutschland, S.425-428
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(2009): Cross Crown Nanogrinding of a Chiplet for a Slider with an integrated Microactuator (SLIM), Proc. ASPE, 24th Ann. Meet. 2009, Monterey, CA, USA, pp. 95
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(2009): Investigation of the Mechanical Response of a Polyurethane-based Coil Coatings System with the Help of Instrumented Indentation and FE Analysis, Proc. Int. Symposium on Plasticity and its Current Applications, St. Thomas, Virgin Islands, USA, pp. 55-57, ISBN 0-9659463-9-8
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(2009): Investigations on the Permeability of soft magnetic Micro Structures, Book of Abstracts, SMM 19, Torino, Italy, G3-01
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(2009): Frictional Investigations on Ball Bearings Lubricated Using Greases with Polymer Additives, Proc. WTC 09, Kyoto, Japan, B2-414, pp. 812
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(2009): Investigation of Fluidic Additives on the Nanohardness During Polishing, Proc. WTC 09, Kyoto, Japan, K-331, pp. 698
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(2009): Challenges in Assembling a Magnetic Shape Memory (MSM) Microactuator, Proc. ASPE 24th Ann. Meet. 2009, Monterey, CA, USA, pp. 431-434
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(2009): Relationship between Removal Rate and Friction Force of a CMP Process for MEMS, Proc. euspen 9th Int. Conf. 2009, San Sebastian, Spain, Vol. 2, pp. 499-502
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(2009): Evaluation of a Prototype CMP Machine for Improving the Global Planarization by MEMS, Proc. ASPE, 24th Ann. Meet. 2009, Monterey, CA, USA, pp. 315-318
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(2009): Technology Development for the Thinning of a Slider with an Integrated Microactuator, Proc. euspen 9th Int. Conf. 2009, San Sebastian, Spain, Vol. 2, pp. 455-458
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(2009): Design, Fertigung und messtechnische Untersuchungen eines Mikroreluktanzaktors. Design, Fabrication and Characterization of a Variable Reluctance Micro Actuator, Proc. MST-Kongress 2009, Berlin, Deutschland, S. 840-843
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(2009): Influence of Vertical Magnetized MnBi Layers on the Permeability of Permalloy Structures, Book of Abstracts, SMM 19, Torino, Italy, F1-11
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(2009): Analyses of Sensor Films on a Carbon Fibre, Proc. (CD), B8.13, 17th Int. Conf. on Composite Materials (ICCM), Edinburgh, United Kingdom
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(2009): Magnetic Polymer Nanoparticles in Gene Delivery Applications, Book of Abstracts, 1st Symposium of the SFB/TR 37, Aachen, Germany, pp. 3
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(2008): Focused Ion Beam Fiber Turning Lathe for Fabricating a Strain Gauge for Carbon Fibers, Proc. euspen 8th Int. Conf. 2008, Zurich, Switzerland, Vol. 2, pp. 129-133
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(2008): An Iterative Approach to Simulate Magnetic Micro Systems by Changing Magnetic Properties, Proc. Int. Conf. on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2008, Freiburg, Germany, pp.213-216
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(2008): Fabrication and Characterization of Microactuators with Discrete MSM Bulk Material, Proc. 11th Int. Conf. on new Actuators 2008, Bremen, Germany, pp. 713-716
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(2008): Evaluation of an Electro-magnetic Micro Actuator Using Scanning Hall Probe Microscopy Measurements, 53rd Conf. on Magnetics and Magn. Materials, Austin, TX, USA, Abstracts, FE-10
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(2008): An Approach for Simulating Magnetic Microactuators, Proc. of International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2008, Freiburg, Germany, pp.217-220
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(2008): Tribological Investigation of CMP for Electroplated NiFe Microstructures, Proc. euspen 8th, Int. Conf. 2008, Zurich, Switzerland, Vol. 1, pp. 138-142
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(2008): Total Quality Management (TQM) Challenges for Incoming and Outgoing Goods in a University Micro Technilogy Fabrication Line, Proc. IAMOT 2008, 17th Int. Assoc. for Manag. of Tech., Conf. CD, Dubai, UAE
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(2008): Micro Hysteresis Sensor for Wafer Level Testing of Magnetic Films, Intermag, Conf. 2008, Madrid, Spain, BC-04
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(2008): Professional Improvement by Study in Engineering Sciences, Proc. IAMOT 2008, 17th Int. Assoc. for Manag. of Tech., Conf. CD, Dubai, UAE
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(2008): Optimization of the Adhesion of Diamond-like Carbon on Glass Substrates for Microelectro Mechanical Systems by Nanoindentational Studies, Leeds-Lyon Symposium on Tribology 2008, Leeds, UK
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(2008): A Management Concept of Competencies Improvement for Students with Prior Vocational, Advanced Education, and Work Experience in Technical Fields, Proc. Picmet, Vol. 2: "Technology Management for a Sustainable Economy." Cape Town, South Africa, Conf. CD
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(2008): Design and Fabrication of a Rotary Micro Synchronus Motor, Proc. 11th Int. Conf. on New Actuators 2008, Bremen, Germany, pp. 457-460
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(2008): Magnetic Micro Electro-Mechanical Systems (MEMS) for Sensor and Actuator Applications, PRiME 2008 Meeting, Honolulu, HI, USA, The Electrochemical Society, MA 2008-2, Abs. 2601.pdf
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(2008): A Management of Technology (MOT) Concept for Handling Disruptive Technologies, Proc. COMS 2007, Melbourne, Australia, Conf. CD
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(2008): Electroplated Cu Micro Electrode for Application in Micro Electrostatic Discharge Machining (EDM), PRiME 2008 Meeting, Honolulu, HI, USA, The Electrochemical Society, MA 2008-2, Abs. 2604.pdf
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(2008): Electromagnetic Dual-position Microactuator for Measurement Applications, Proc. 11th Int. Conf. on new Actuators 2008, Bremen, Germany, pp. 774-777
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(2008): A Slider with an Integrated Microactuator (SLIM) for Second Stage Actuation in Hard Disc Drives, Intermag, Conf. 2008, Madrid, Spain, DF-05 IEEE Trans. on Magn., Vol. 44, No. 11, pp. 3730-3733
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(2008): A Concept for Complementary Micro NanoTechnology Education in Universities, Proc. COMS 2007, Melbourne, Australia,Conf. CD
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(2008): Long Term Investigations on NiFe Electroplating Process, PRiME 2008 Meeting, Honolulu, HI, USA, The Electrochemical Society, MA 2008-2, Abs. 2584.pdf
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(2008): Development of Magnetic Magnesium for Data Storage in Gentelligent Products, JEMS 2008, Dublin, Ireland (submitted)
-
(2008): Development of a System for Data Storage on Machine Components , Proc. (CD), I PROMS 2008, the 4th Virtual Conf. of the EU-funded FP6 I PROMS Network of Excellence on Innovative Production Machines and Systems, pp. 454-459, Wales, UK
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(2008): Fabrication and Assembly of a Magnetic Recirding Head, Proc. euspen 8th Int. Conf. 2008, Zurich, Switzerland, Vol. 2, pp. 143-147
-
(2008): Investigations on a Permalloy Keeper Layer for the Readout of Magnetically Stored Data based on the Magneto-optical Kerr Effect, 53rd Conf. on Magnetics and Magn. Materials, Austin, TX, USA, Abstracts, BG-10
-
(2008): Dicing Process Optimization for Sapphire and Altic, Proc. euspen 8th Int. Conf. 2008, Zurich, Switzerland, Vol. 1, pp. 121-125
-
(2008): Investigations on the Permeability of Thin-Film Soft Magnetic Structures, 53rd Conf. on Magnetics and Magn. Materials, Austin, TX, USA, Abstracts, FE-10
-
(2008): Correlation between Performance and Boundary Layers in Grease Lubricated High speed Bearings, iCAT, 2nd Intern. Conf. on Advanced Tribology, Singapore, Ext. Abstracts, pp. 186-188
-
(2008): Design of Experiment (DOE) for Optimizing a NiFe 45/55 Electroplating Process, PRiME 2008 Meeting, Honolulu, HI, USA, The Electrochemical Society, MA 2008-2, Abs. 2583.pdf
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(2008): Investigations on Embedding Nanoparticles by Electroplating, PRiME 2008 Meeting, Honolulu, HI, USA, The Electrochemical Society, MA 2008-2, Abs. 2595.pdf
-
(2008): A Concept for Characterization and Analysis of the readout of Soft Magnetic Thin-Films, PRiME 2008 Meeting, Honolulu, HI, USA, The Electrochemical Society, MA 2008-2, Abs. 2605.pdf
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(2008): Dicing Process for the Device Separation of a Slider with an Integrated Microactuator (SLIM), Proc. ASPE 23rd Ann. Meet. 2008 and 12th ICPE, Portland, OR, USA, pp. 380-383
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(2008): Integration of a Temperature Sensor into a Modular, Multifunctional Micro Sensor Family, Proc. (CD), I PROMS 2008, the 4th Virtual Conference, of the EU-funded FP6 I PROMS Network of Excellence on Innovative Production Machines and Systems, pp. 472-476, Wales, UK
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(2007): Three-dimensional Micro Fabrication of Mechanical Systems Using Layer Based Stereo Lithography, Proc. 8th LPM 2007, Vienna, Austria
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(2007): Alternatives for Fabricating Aerostatic Micro Guides, Proc. Smart Systems Integration 2007, European Conference & Exhibition on integration issues of miniaturized systems – MEMS, MOEMS, ICs and electronic components, Paris, France, pp. 604-607
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(2007): Miniaturized Cryoprobe for the Local Deactivation of Neural Networks, Proc. EUSPEN 7th Int. Conf. 2007, Bremen, Germany, Vol. 1, pp. 73-77
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(2007): Design and Technology of a Magnetic Levitation System for Linear Micro Actuators, Proc. ASME 2007, Las Vegas, NV, USA, DETC2007-34676, ISBN 0-7918-3806-4
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(2007): Fertigung von Anrtiebs- und Führungskomponenten für Mikromotoren, Kolloquium Mikroproduktion, Forschungzentrum Karlsruhe GmbH, Karlsruhe, Deutschland, S. 165-170
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(2007): A Study on Determining of the Current and Future Need for Specialists in High Technology Industries, Book of Abstracts and Proc. 16th Int. Assoc. for Manag. of Tech. IAMOT 2007, Miami, Florida, USA
-
(2007): Recognition of Professional Qualifications for University Students in Engineering Sciences, Book of Abstract. 16th Int. Assoc. for Manag. of Tech. IAMOT 2007, Miami, FL, USA
-
(2007): Stress, Friction and Life in Micro Actuator Contact Surfaces, Leeds-Lyon Symposium on Tribology 2007, France
-
(2007): A Slider with an Integrated Microactuator (SLIM) for Second Stage Actuation in Hard Disc Drives, Proc. IMST 2007 FIM XV, Eindhoven, The Netherlands
-
(2007): Combination of Mechanical Micromachining and Glass Bonding to Fabricate Robust Micro Structures for Painless Drug Delivery, Proc. ASPE 22th Ann. Meet. 2007, Dallas, TX, USA, pp. 147-150
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(2007): Linear Synchronous Micro Motor with Further Miniaturized Dimensions, Proc. ASME 2007, Las Vegas, NV, USA, DETC2007-34677, ISBN 0-7918-3806-4
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(2007): Hart- und weichmagnetische Materialien für elektromagnetische Mikroaktoren, Kolloquium Mikroproduktion, Forschungzentrum Karlsruhe GmbH, Karlsruhe, Deutschland, S. 159-164
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(2007): Assembly Concept of a Magnetic Levitation System for a Linear Micro Actuator, Proc. ASME 2007, Las Vegas, NV, USA 2007, DETC2007-35266, ISBN 0-7918-3806-4
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(2007): Challenges and Solutions for the Assembly of a Linear Micro Step Motor, Proc. EUSPEN 7th Int. Conf. 2007, Bremen, Germany, Vol. 2, pp. 384-387
-
(2007): Effect of Feed Rate and Grain Concentration on Ductile to Brittle Transition by Silicon Dicing, Proc. EUSPEN 7th Int. Conf. 2007, Bremen, Germany, Vol. 2, pp. 380-383
-
(2007): Investigation on the Impact on Process Quality When Utilizing Different Pads during Chemical-Mechanical Polishing of MEMS, Proc. ASPE 22nd Ann. Meet. 2007, Dallas, TX, USA, pp. 469-472
-
(2007): Concept for Distinction Between the Circumferential and Sidewall Effects during Dicing of Single Crystal Silicon, Proc. ASPE 22nd Ann. Meet. 2007, Dallas, TX, USA, pp. 386-389
-
(2007): Fortschritte bei der Auslegung und Regelung aktiver Mikrosysteme, Kolloquium Mikroproduktion, Forschungszentrum Karlsruhe GmbH, Karlsruhe, Deutschland, S. 171-178
-
(2007): Temperature Characteristics of a Magnetic Micro Strain Gauge, EUROMAT 2007, Nürnberg, Germany, Physica Status Solidi (c), Symposium A23: Magnetic Thin Films. Wiley-VCH Verlag
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(2006): Concept for a Wafer Level Test System for Measuring Magnetic Film Properties, 210th Meet. of The Electrochemical Society 2006, Cancun, Mexico
-
(2006): Recognition of Professional Qualification for University Students in Engineering Sciences, Book of Abstract 15th Int. Ass. for Manag. of Tech. IAMOT 2006, Beijing, P.R. China
-
(2006): Electromagnetic Dual-position Actuator for Measurement Applications, Proc. Actuator 2006, 10th Int. Conf. on New Actuators, Bremen, Germany, pp. 824-827
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(2006): Advances in Magnetic Micro Thin-film Transducers, 210th Meet. of The Electrochemical Society, Cancun, Mexico, 2006
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(2006): Total Quality Management System for a Micro and Nano Technology Oriented University Institution, Proc. 15th Int. Ass. for Manag. of Tech. IAMOT 2006, Beijing, P.R. China
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(2006): Characterization of Magnetic Shape Memory (MSM) Material and its Application in a Hybrid Micro Actuator, Proc. Actuator 2006, 10th Int. Conf. on New Actuators, Bremen, Germany, pp. 406-409
-
(2006): Advances in the Development of a Linear Hybrid Micro Actuator, Proc. Actuator 2006, 10th Int. Conf. on New Actuators, Bremen, Germany, pp. 207-210
-
(2006): Modeling CMP - Investigation of the Chemical Attack on the Mechanical Properties of Bulk Material, Proc. EUSPEN 6th Int. Conf. 2006, Baden, Austria
-
(2006): Ceramic Micro Needle Array for Painless Drug Delivery and Biological Sensing, Proc. EUSPEN 6th Int. Conf. 2006, Baden, Austria Sensing
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(2006): Combining Mechanical Micromachining and Glass Bonding to Fabricate Robust Micro Structures, Proc. EUSPEN 6th Int. Conf. 2006, Baden, Austria
-
(2006): Development of a MIG-Head for Magnetic Storage of Information on Machine Components, 210th Meet. of The Electrochemical Society 2006, Cancun, Mexico
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(2006): Directional Permeability Dependence in Electroplated Permalloy Layers, Proc. 210th Meet. of The Electrochemical Society, Cancun, Mexico, ecs transactions, Vol. 3, Issue 25, pp. 123-135
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(2006): A Concept for a Toolbox for Modular Magnetic Microsensors, 210th Meet. of The Electrochemical Society 2006, Cancun, Mexico
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(2005): A Business Process Model for MEMS, 14th Int. Ass. for Manag. of Tech. IAMOT 2005, Vienna, Austria
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(2005): Thin Film Inductive Micropositioning Sensor, Proc. XIX Eurosensors Conf., Barcelona, Spain, Vol. II (W), pp. WPb25
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(2005): Kerf Sidewall Grove Formation during Ductile Dicing of Ceramic Materials, Proc. ASPE 20th Ann. Meet. 2005, Norfolk, Virginia, USA, pp. 387-390
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(2005): GoPro, a business process model to support the development for MEMS, COMS 2005, Baden-Baden, pp. 256-260
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(2005): Investigations on the Influence of the Substrate’s Thickness on the Cut Quality During Dicing of thin Silicon Wafers, Proc. euspen 5th Int. Conf. and 7th Ann. Gen. Meet. 2005, Montpellier, France, Vol. 2, pp. 589-590
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(2005): Magnetische Mikrobauteile, Proc. 8. Symposium Magnetoresistive Sensoren; Grundlagen - Herstellung - Anwendungen, 2005, Sensitec GmbH, Georg-Ohm-Str.1, D35633 Lahnau, pp. 28-36
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(2005): Evaluation of a Micro Motor with Integrated MSM Material , Digest IEEE Intermag Conf. 2005, Nagoya, Japan, GF12, pp. 1683-1684
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(2005): Modeling CMP - Investigation of the Mechanical Removal Mechanism, Proc. ASPE 20th Ann. Meet. 2005, Norfolk, Virginia, USA, pp. 500-503
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(2004): NiFe 45/55 and its Application in a Strain Gauge Sensor, Proc. 8th Int. Symposium on Magnetic Materials, Processes and Devices, 206th Meet. of The Electrochemical Society 2004, Honolulu, Hawaii, USA, pp. 481-492
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(2004): Magnetoelastic microtransformer with an improved sensor design, Digests 9th Joint MMM-Intermag Conf. 2004, Anaheim, CA, USA, GP-15
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(2004): Application of Far Field and Near Field Sliders in Optical Data Storage, Digest 9th Joint MMM-Intermag Conf. 2004, Anaheim, CA, USA, GP-13
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(2004): Computer-Aided Variants Finding, Proc. 13th Int. Ass. for Manag. Of Tech. IAMOT 2004, Washington, D.C. USA
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(2004): Microfabricated Inductive Linear Micro Positioning Sensor, Proc. 3rd IEEE Int. Conf. on sensors, IEEE Sensors 2004, Vienna, Austria, ISBN 0-7803-8692-2
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(2004): Microfabricated Inductive Sensor for Position Measurements, Proc. 8th Int. Symposium on Magnetic Materials, Processes and Devices, 206th Meet. of The Electrochemical Society 2004, Honolulu, Hawaii, USA, pp. 471-480
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(2004): Magnetic Materials in Thin Film Sensors and Actuators, Proc. 8th Int. Symposium on Magnetic Materials, Processes and Devices, 206th Meet. of The Electrochemical Society 2004, Honolulu, Hawaii, USA, pp. 457-470
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(2004): Mechanical Machining of Thin Polycrystalline Diamond Films, ASPE 19th Ann. Meet. Orlando, Florida, USA, pp. 594-697
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(2004): Improved Dicing Method for Thin Silicon Wafers, Proc. 4th euspen Int. Conf. and 6th Ann. Gen. Meet. 2004, Glasgow, UK, pp. 143-144
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(2004): Dicing of thin stacked wafer packages, Proc. 7th Int. Symposium on Advances in Abrasive Technology 2004, Bursa, Turkey, pp. 443-446
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(2004): Alternatives for Micro-machined Linear Actuators, Proc. 9th Int. Conf. on New Actuators 2004, Bremen, Germany, pp. 665-668
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(2004): Evaluation of a Linear Hybrid Micro Step Motor, Proc. 8th Int. Symposium on Magnetic Materials, Processes and Devices, 206th Meet. of The Electrochemical Society 2004, Honolulu, Hawaii, USA, pp. 493-505
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(2004): Investigation of the permeability on electroplated and sputtered permalloy, Proc. 8th Int. Symposium on Magnetic Materials, Processes and Devices, 206th Meet. of The Electrochemical Society 2004, Honolulu, Hawaii, USA, pp. 526-536
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(2004): Patterning Techniques for Thick SmCo Layers, Proc. 18th International Workshop on High-Performance Magnets and Their Applications 2004, Annecy, France, pp. 805-816
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(2004): Design, Fabrication, and Characterization of a Hybrid Linear Micro Step Motor, Proc. 9th Int. Conf. on New Actuators 2004, Bremen, Germany, pp. 665-668
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(2004): The Influence of Chemical and Physical Boundary Layer Properties on the Tribological Performance of Rolling Element Bearings, Proc. of 14th Int. Colloquium on Tribology 2004, Stuttgart/Ostfildern, pp. 1385-1393
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(2003): A Novel Flying Height Measurement Approach for Optical Sliders, IEEE Proc. of AsiaSENSE 2003, Kuala Lumpur, Malaysia, pp. 29-32
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(2003): Concepts for In-situ Flight Attitude Measurements of Optical Flying Heads, Proc. Innovative Mass Storage Technology Workshop (IMST) 2003, Grenoble, France, Or 41
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(2003): Combined Matrix Selection to Support the Development of Products, Proc. 12th Int. Ass. for Manag. of Tech. IAMOT 2003, Nancy, France
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(2003): Design and fabrication of an inductive micro position sensor, Statusseminare BMBF-Verbundvorhaben, Microtec, München, S. 295-300
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(2003): Mikrostrukturierung durch Schleifen, Mikromechanische Produktionstechnik, Abschlusskolloquium DFG Schwerpunktprogramm 1012. Shaker, Aachen, S. 39-54
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(2003): Nano-Roughness Standards with a Very Low Roughness Value, Proc. euspen 4th Int. Top. Conf. 2003, Aachen, Germany, Vol. 2, pp. 495-498
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(2003): Precision Profile Grinding of High Aspect Ratio Microstructures, Proc. euspen Int. Top. Conf. 2003, Aachen, Germany, pp. 349-352
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(2003): An Electromagnetically Actuated Bi-stable MEMS Optical Microswitch, Proc. Transducers 03, Boston, MA, USA, pp. 1514-1517
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(2003): Optimization of Chemical Mechanical Polishing of Thin Silicon Wafers, Proc. euspen Int. Top. Conf. 2003, Aachen, Germany, Vol. 1, pp. 293-296
-
(2003): Investigations Regarding the Interdependence of Spindle Load and Machine Performance During Slicing, Proc. ASPE 18th Ann. Meet. 2003, Portland, Oregon, USA, pp. 435-438
-
(2003): Tribology of textured pico-slider at a flying height of 5 nm, Proc. TISD 2003, Monterey, CA, USA
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(2003): Slider Vibration Reduction Using Slider Surface Texture, Proc. Joint Conf. on MIPE 2003, Japan
-
(2003): Non-reactive and reactive ion etching processes for patterning magnetic MEMS components, Proc. of the 2nd MICRO.tec Conf. 2003, Munich, pp. 51-52
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(2003): Erzeugung magnetischer NiFe-Dünnfilme durch galvanische Abscheidung mit Pulse-Plating, Oberflächentage 2003, DGO-Veranstaltung, Tagungsband, Bremen
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(2003): A batch fabricated linear synchronous motor, Proc. Int. Mech. Eng. Congr. and Expo IMECE 2003, Washington D.C., USA, pp. 1-8
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(2003): Influence of the initial surface roughness on the wear behaviour of micro probes under rotating and oscillating flat micro contact, Proc. 2nd MICRO.tec Conf. 2003, Munich, pp. 477-478
-
(2003): Thick Sputter Deposited NiFe 45/55 Films for Flux Guides In Magnetic MEMS, Proc. 16th Soft Magnetic Materials Conf. 2003, Düsseldorf, Germany, pp. 867-872
-
(2002): Entwicklung eines Wegmesssensors zur Überwachung eines Mikropositionierers, Proc. 47th Internationales Wissenschaftliches Kolloquium 2002, Ilmenau, S. 673-674
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(2002): FEM Simulation for Design and Evaluation of an Eddy Current Microsensor, Proc. 14th European Simulation Symposium and Exhibition 2002, Dresden, Germany, pp. 201-205
-
(2002): Advances in European Magnetic MEMS Technology, Invited paper, Proc. 7th Int. Symposium on Magnetic Materials, Processes and Devices, 202nd Meet. of The Electrochemical Society 2002, Salt Lake City, UT, USA, pp. 90-108
-
(2002): High Precision Machining of a Longitudinal Bearing for a Linear Microactuator, Proc. 3rd Int. euspen Conf. 2002, Eindhoven, The Netherlands, pp. 325-328
-
(2002): Mechanical Micromachining of High Aspect Ratio Microstructures, Proc. ASPE 2002, 17th Ann. Meet. 2002, St. Louis, Missouri, USA, pp. 562-566
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(2002): Dicing of Ultra-thin Silicon Wafers, Proc. ASPE 2002, 17th Ann. Meet. 2002, St. Louis, Missouri, USA, pp. 557-561
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(2002): Chipping Minimization during Dicing and Slicing, Proc. ASPE 2002, 17th Ann. Meet. 2002, St. Louis, Missouri, USA, pp. 551-556
-
(2002): The effect of Slider Texture on the Tribology of Near Contact Recording Sliders, Proc. Austrib 2002, Perth, Australia, pp. 229-126
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(2002): Optimizing the Magnetic Properties of Electroplated Permalloy for Flux Guides in Micromotors, Proc. 7th Int. Symposium on Magnetic Materials, Processes and Devices, 202nd Meet. of The Electrochemical Society 2002, Salt Lake City, UT, USA, pp. 125-136
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(2002): Design, Fabrication, and Characterization of a Miniature Linear Asynchronous Motor, Proc. Actuator 2002, Bremen, Germany, pp. 176-179
-
(2002): Investigations on the Pole Geometry Optimization of a Variable Reluctance Microactuator, 47. Internationales Wissenschaftliches Kolloqium, Ilmenau, Germany, pp. 215-216
-
(2002): Magnetic Properties of Thick Sputter Deposited SmCo-Films for MEMS-Applications, Digest Intermag Europe 2002, Amsterdam, The Netherlands, GD05
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(2002): Ni Electroplating in SU-8 Microforms for Fabricating Self Supporting Microstructures, Proc. 7th Int. Symposium on Magnetic Materials, Processes and Devices, 202nd Meet. of The Electrochemical Society 2002, Salt Lake City, UT, USA, pp. 137-148
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(2002): Electromagnetic Bearing System for Integration in a Linear Microactuator, Proc. Eurosensors XVI, The 16th European Conf. on Solid-State Transducers 2002, Prague, Czech Republic, pp. 1217-1220
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(2002): Characterization of High-Speed Rolling Element Bearing, Greases and Additives with TOF-SIMS, Proc. SIMS Europe, Münster, Germany, pp. 32
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(2001): A Magnetically Actuated Scanner for Intravascular Ultrasound Imaging, Proc. ASME IMECE 2001, Int. Mechanical Engineering Congress and Exposition, New York, USA, Vol. 2, MEMS 23914
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(2001): The Fabrication of Nano-Roughness Standards for the Calibration of Atomic Force Microscopes, Proc. ASPE 16th Ann. Meet. 2001, Virginia, USA, pp. 493-496
-
(2001): Roughness Standards for the Calibration of SPM- from Design to Comparison Measurement, Proc. 5th Seminar on Quantitative Microscopy, Nanoscale 2001, Bergisch Gladbach, pp. 7-13
-
(2001): Investigations Regarding the Operating Range of Ultrathin Grinding Wheels on AlTiC, Proc. 10th ICPE 2001, Yokohama, Japan
-
(2001): Dual Wheel Miniature Gang for Silicon Wafer Dicing, Proc. euspen 2nd Intern. Conf. 2001, Turin, Italy, pp. 722-725
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(2001): DLC Coating Technology for Cutting Tools, Proc. 2nd Int. Conf. 2001 THE Coatings, Hanover, C2-1-7
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(2000): Advances in Dicing Wafers for Micro Electro-Mechanical Systems (MEMS), Proc. Micro.tec Conf. 2000, Hanover, VDE Publication, Vol. 2, pp. 621-625
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(2000): Investigations on the Tool Plate Preparation for Nanogrinding, Proc. ASPE 15th Ann. Meet. Scottsdale, AZ, USA, pp. 90-93
-
(2000): A Novel Variable Reluctance Micromotor for Linear Actuation, Proc. Actuator 2000, Bremen, Germany, pp. 363-366
-
(2000): Investigations on the Coolant Supply in Precision Dicing, Proc. ASPE 15th Ann. Meet. 2000, Scottsdale, AZ, USA, pp. 90-93
-
(2000): Metall-Kapillardruckgießen: ein neues Urformverfahren für die Mikromechanik (Metal Capillary Casting, a New Micromechanical Technology), 7. Werkstoffwissenschaftliches Kolloquium, Innovative Werkstofftechnologie 1999, Aachen, Werkstoffwissenschaftliche Schriftenreihe, Band 41, S. 67-73
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(1999): Investigations on the Wear Profile of Dicing Wheels, Proc. ASPE 14th Ann. Meet. 1999, Monterey, CA, USA, pp. 67-70
-
(1999): Plate Topography Influence on the Nanogrinding Process., Proc. ASPE 14th Ann. Meet. Monterey, CA, USA, pp. 83-86
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(1999): Kerf Sidewall Phenomena in Slicing Processes of Thin Film Heads, Proc. euspen 1st Int. Conf. 1999, Bremen, pp. 548-461
-
(1999): Composition Dependent Magnetostrictive Properties of NiFe Films, Proc. ASME Ann. Meet. 1999, Nashville, Tennessie, USA, pp. 151-155
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(1999): Magnetoelastic Microtransformer with an Improved Core Design, Digest IEEE Intermag Conf. 1999, Kyongju, South Korea, GF-02, ISBN:0-7803-5555-5
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(1999): Technological Challenges in Ultraprecision Grinding of Flexural Microsensor, Proc. euspen 1st Int. Conf. 1999, Bremen, Germany, Vol. 1, pp. 538-541
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(1999): Investigations on Capillary Action Microcasting of Metals, Proc. EUSPEN 1st Int. Conf. 1999, Bremen, Germany, Vol. 1, pp. 490-493
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(1998): Risk Management and Product Integrity – A Simple Approach to Concurrent Engineering, Proc. TMCE 1998, Manchester, UK
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(1998): Mechanical Microprofiling Mechanisms of Advanced Ceramics, Proc. 13th Ann. Meet. 1998, St Louis, MO, USA, pp. 69-75
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(1998): Ductile Mode Cutting of Silicon Microparts, Proc. ASPE Spring Topical Meet. 1998, Monterey, CA, USA
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(1997): Precision Engineering Requirements in Magnetic Memory Disc File Systems, Invited paper, Proc. 9th Precision Engineering Seminar 1997, Braunschweig
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(1997): Risk Management and Product Integrity – A Simple Approach to Concurrent Engineering, Proc. TMCE 1998, Manchester, UK, 1997
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(1997): Applying Scanning Probe Microscopy to Ultraprecision-Machining, Proc. european Workshop on Microtechnology and Scanning Probe Microscopy 1997, Mainz
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(1997): Rauheitsmessungen im Subnanometerbereich: Vergleich optischer und tastender Messverfahren (Roughness Measurement in the Subnanometer Range – a Comparison between Optical and Tactile Methods), Proc. Workshop 1997: New Developments and Applications in Scanning Probe Microscopy, Dresden, Germany
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(1997): White Light Interferometry and Atomic Force Microscopy Grinding Tool Topography Measurements - A Comparison, Proc. 4th Int. Conf. on Ultraprecision in Manufacturing Engineering 1997, Braunschweig, Germany
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(1997): Grinding Tool Topography Analysis by White Light Interferometry and Atomic Force Microscopy, Proc. 9th Precision Engineering 1997, Braunschweig
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(1997): Ultraprecision Grinding of High Aspect Ratio Microparts, Proc. ASPE 12th Ann. Meet. 1997, Norfolk, UK, VA, pp. 454-457
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(1997): Technological Investigations for the Manufacture of Giant Magnetoresistive (GMR) Structures, Proc. SICAN Fall Conf. 1997, Hanover, Germany
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Konferenz
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DOI: 10.15544/balttrib.2022.9 -
(2022): Application of batch manufactured flexible micro-grinding tools on copper and oxidized copper surfaces, 63. Tribologie Fachtagung der GfT
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(2022): The effect of tin coating in combination with phosphoric acid primers on bone cement bond strength to total hip stem alloys, MSE 2020 - Materials Science and Engineering Congress, Darmstadt, Deutschland
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(2022): Development and investigation of tin coatings for increased bone cement detachment at implant interfaces, 1st International SIIRI Symposium: CRC/TRR 298 SIIRI - Safety-Integrated and Infection-Reactive Implants, Hanover, Germany, August 2022
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(2022): Concept and fabrication of functionalized indenter tips for adhesion studies in XHV-adequate atmosphere, MSE Congress 2022
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(2022): Fabrication of a Low Profile Planar Transformer Using Molded Interconnect Device Technology, Electronics System-Integration Technology Conference (ESTC) 2022
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(2021): Entwicklung einer Polyimidmembran für elektromagnetische Mittelohr-Aktoren, MikroSystemTechnik Kongress 2021
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(2021): Fabrication of a Low Profile Planar Transformer Using a Dual PCB Approach, MikroSystemTechnik Kongress 2021
ISBN: 978-3-8007-5656-8 -
(2021): Simulationsgestützte Auslegung und Fertigung von piezoelektrischen Kraftsensor-Arrays zur Untersuchung des Ultraschall-Drahtbondprozesses, MikroSystemTechnik Kongress 2021
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(2021): Kombination von additiver und dünnfilm-technischer Fertigung zur Herstellung eines Drucksensors für biomedizinische Anwendungen, MikroSystemTechnik Kongress 2021
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(2021): Folienübertragung von Dünnfilmen auf Metalloberflächen mithilfe von Sol-Gelen, Self-Assembling Monolayers und Wasserglas, MikroSystemTechnik Kongress 2021
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(2021): Direktabgeschiedene Dünnfilm-Dehnungsmessstreifen für erhöhte Temperaturen, MikroSystemKongress 2021
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(2021): Direktabgeschiedene Dünnfilmsensorik mithilfe einer neuartigen Beschichtungsanlage, NDVaK - Neues Dresdner Vakuumkolloquium
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(2021): Mikrotechnologische Fertigung von integrierten optischen Gittern mittels Lift-Off-Prozess für den Einsatz in Atominterferometern, MikroSystemTechnik Kongress
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(2021): Investigation of tribologically relevant surface layers formed on non-ferrous metals in oxygen-free conditions, European Symposium on Friction, Wear and Wear Protection, Friction 21
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(2019): Substrate Modification Influence on Properties of Nanocomposite Based on TiO2 and Gold Nanoparticles, International Conference "Emerging Trends in Applied and Computational Physics 2019" (ETACP-2019) 21–22 March 2019, Saint-Petersburg, Russian Federation
DOI: doi:10.1088/1742-6596/1236/1/012025 -
(2019): Elektrische Kontaktierung bauteilinhärenter Dehnungsmesssensorik mithilfe des Transient Liquid Phase (TLP) Bonding, MikroSystemTechnik Kongress 2019
ISBN: 978-3-8007-5090-0 -
(2019): AMR-based mechanical pressure sensors: a proof of concept, 15th International Symposium Magnetoresistive Sensors and Magnetic Systems
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(2019): AMR Sensoren auf flexiblem Substrat zur Messung von Verformungen eines hartmagnetischen Partikel-Elastomerverbunds, Proceedings of the MikroSystemTechnik Kongress 2019
ISBN: 978-3-8007-5090-0 -
(2018): A laser-based, in-line chlorine dioxide concentration sensor, Proceedings of Symposium on Automated Systems and Technologies, Hanover, Germany (TEWISS Verlag)
ISBN: 978-3-95900-223-3 -
(2017): Hot stamping process reliability – Innovative sensor technology for inline quality assurance, Conference Strategies in Car Body Engineering, 22-23 March 2017, Bad Nauheim
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(2017): Anodische Auflösung von Aluminium als Downsizing Technik für Mikro-Induktivitäten, MikroSystemTechnik Kongress 2017 · 23. – 25. Oktober 2017 in München (Seite 624-627)
ISBN: 978-3-8007-4491-6 -
(2017): Mikroaktorik für ein Taktiles Display, Proceedings of the MikroSystemTechnik Kongress 2017, München, pp. 515-518 Weitere Informationen
ISBN: 978-3-8007-4491-6 -
(2017): Reaktives Ionentiefenätzen von Schattenmasken für die Sensordirektabscheidung mit einer neuartigen Beschichtungsanlage, Proceedings of the MikroSystemTechnik Kongress 2017, München, pp. 680-683 Weitere Informationen
ISBN: 978-3-8007-4491-6 -
(2017): Elektromechanischer Mikro-Biegeaktor als optischer Shutter, Proceedings of the MikroSystemTechnik Kongress 2017, München Weitere Informationen
ISBN: 978-3-8007-4491-6 -
(2017): Mikrofluidische Galvanik zur Herstellung magnetoresistiver Schichten, MikroSystemTechnik Kongress München
ISBN: 978-3-8007-4491-6 -
(2016): Manufacturing of micro end mills by batch processing of silicon carbide, 16th International Conference & Exhibition proceedings, pp. 327-328, Notthingham, June 2016
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(2016): Transmission laser bonding of low melting eutectic alloys, SPIE High-Power Laser Materials Processing: Lasers, Beam Delivery, Diagnostics, and Applications
DOI: 10.1117/12.2230399 -
(2016): Thin-Film Based Microtransformer Suitable for High Switching Frequency Power Applications, PCIM Europe 2016; International Exhibition and Conference for Power Electronics, Intelligent Motion, Renewable Energy and Energy Management; Proceedings of Weitere Informationen
ISBN: 978-3-8007-4186-1 -
(2016): Electroplating through Fluidic Channels as Production Technology for 3D Interconnect Devices and Sensing Structures, ECS Transactions. 2016 volume 75, issue 7, 25-32 Weitere Informationen
DOI: 10.1149/07507.0025ecst -
(2016): Normal force actuator for a tactile display using a micromechanically built spring element made of Polyimide, ACTUATOR 2016, 15th International Conference on New Actuators, Bremen Weitere Informationen
ISBN: 978-3-933339-26-3 -
(2015): High Surface Qquality of Sintered Silicon Carbide by Chemical Mechanical Polishing, Proc. 15th euspen Int. Conf. Leuven, Belgium, pp. 41-42
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(2015): Design und Herstellung eines akustischen Wandlers mit einer Polymermembran, Mikrosystemtechnik-Kongress (MST2015), Karlsruhe, Deutschland, VDE Verlag GmbH – Berlin – Offenbach, S. 606-609
ISBN: 978-3-8007-4100-7 -
(2015): Fertigung eines Gitterelektroden-Arrays zur selektiven hyperthermischen Manipulation von Biofilmen, Mikrosystemtechnik-Kongress (MST2015), Karlsruhe, Deutschland, VDE Verlag GmbH – Berlin – Offenbach, S.824-827
ISBN: 978-3-8007-4100-7 -
(2015): Entwurf und Fertigung eines elektromagnetischen Normalkraftaktors in hybrider Bauform für tactile Displays., Mikrosystemtechnik-Kongress (MST2015), Karlsruhe, Deutschland, VDE Verlag GmbH – Berlin – Offenbach, S. 761-764
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(2015): Near-Net-Shape Production Of sub-mm Structures in Green/White State Porcelain Ceramics., Proc. 15th euspen Int. Conf. Leuven, Belgium, pp. 333-334
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(2013): MEMS Fabricated Microtransformer with Closed Fe-Co Magnetic Core for High Frequency Power Applications, 58th Magnetism & Magnetic Materials (MMM2013), Denver CO, USA, p. 352
Berichte
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(2006): Baukasten multifunktionaler Mikrosensoren für Messaufgaben in der Fertigungstechnik, wt Werkzeugtechnik online, Jahrgang 96, H. 11/12, S. 866-870
Zeitschriften/Aufsätze
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(2016): Effect of Substrate Temperature on Magnetic Properties of Electroplated 82Ni-15Fe-3W Alloy Films, IEEE Trans. on Magnetics, Vol. 52, Issue 8 Weitere Informationen
DOI: 10.1109/TMAG.2016.2549987 -
(2016): Effect of Annealing Temperature on the Coercivity and the Electrical resistivity of the Electroplated Ni-Fe-W alloy film, ECS Trans., Vol. 75, Issue No. 2, Magnetic Materials, Processes, and Devices, pp. 59-65 Weitere Informationen
DOI: 10.1149/07502.0059ecst -
(2011): Process Development of an Electoplated Permalloy Layer on Magnetic Magnesium for Gentelligent Products, ECS Transactions, Vol. 33, Issue 34, Magnetic MEMS and Devices, 2011, pp. 93-104
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(2011): Electroplating Hard Magnetic SmCo for Magnetic Microactuators Applications, Journal of Applied Physics, Vol 109, No. 7, 2011
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(2011): Assembly and Embedding of Nanoparticles in a Ni-matrix., ECS Transactions, Vol. 33, Issue 34, Magnetic MEMS and Devices, 2011, pp. 33-42
DOI: 10.1149/1.3573586 -
(2011): Einsatz von Kupfer und Kupferlegierungen in der Mikrosystemtechnik, HochschulKupferSymposium, Hannover, Deutschland, Fachzeitschrift Metall, 65. Jg., Nov. 2011, S. 504-506
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(2011): Fabrication of MEMS on Printed Circuit Boards, ECS Transactions, Vol. 33, Issue 34, Magnetic MEMS and Devices, 2011, pp. 69-80
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(2011): Ultra-precision Dicing and Wire Sawing of Silicon Carbide (SiC), “Microelectronic Engineering” Journal (spec. issue), Proc. 36th International Conf. on Micro&Nanoengineering (MNE10), Genoa, Italy, Vol.88, Nr. 9, 2011, pp. 2500-2504
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(2011): Einfluss verschiedener Blatteigenschaften auf die Schnittqualität beim Präzisionstrennschleifen von mikrosystemtechnischen Materialien, wt Werkstatttechnik online, Springer VDI Verlag, Ausgabe 1f1/12 des Jahrgangs 2011
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(2010): Analyses of Sensor Films on a Carbon Fibre, Journal of Materials Science and Engineering, Sept. 2010, Vol. 4, No. 9, (Serial No. 34), ISSN 1934-8959, USA, 2010
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(2010): Minimizing Oxygen Inclusion when Electroplating High Saturation Density CoFe for Microelectromechanical System, Journal of Applied Physics 107, Issue 9, pp. 09A311-09A311-3, 2010
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(2010): Development and Application of Magnetic Magnesium for Data Storage in Gentelligent Products, Journal of Magnetism and Magnetic Material 322, Elsevier, pp. 1134-1136, 2010
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(2010): Broad-band Ferromagnetic Resonance Characterization of Lossy Ferromagnetic Metallic Elements, Journal of Applied Physics 107, Issue 11, pp. 113906-113906-7, 2010
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(2009): Investigation of the Mechanical Behavior of a PU-Based Coil-Coating System with the Help of Indentation and FE Analysis, Key Engineering Materials Vols. 410-411 (2009), pp. 217-224
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(2009): Evaluation of an Electromagnetic Microactuator using Scanning Hall Probe Microscopy Measurements, Journal of Applied Physics, AIP, Vol. 105, 07F119-1
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(2008): Properties of Three-Dimensional Precision Objects Fabricated by Using Laser Based Micro Stereo Lithography, JLMN-Journal of Laser Micro/Nanoengineering, Vol. 3, No. 2, pp. 67-72
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(2008): Manufacturing Technology for the Fabrication a Discrete Actuator Using a Magnetic Shape Memory Alloy, E-MRS-Symposium 2007, Warsaw, Poland, European Physics Journal, Springer Verlag Berlin Heidelberg New York, Special Topics 158, pp. 243-247
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(2008): Application of MSM Bulk Material in a Hybrid Microactuator, EUROMAT 2007, Nürnberg, Germany, Physica Status Solidi (a) 205, No. 10, pp. 2307-2312 Wiley-VCH Verlag
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(2008): Fabrication and Test of Multi Layer Micro Coils with a High Packaging Density, HARMST2007, Besançon, France, Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 14, No. 9-11, pp. 1589-1592
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(2008): Studies on Diamond-like Carbon Coatings for the Application in Micro Actuators, EUROMAT 2007, Nuremberg, Germany, (accepted for Advanced Engineering Materials), Wiley-VCH Verla
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(2008): A Concept for Magnetic Data Recording on Genetically Intelligent ("Gentelligent") Components, EUROMAT 2007, Nuremberg, Germany, Physica Status Solidi (c) 5, No. 11, pp. 3547-3550, Wiley-VCH Verlag
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(2008): Investigation on a NiFe Alloy with a Coefficient of Thermal Expansion Matching the One of Silicon, MMM 2007, Tampa, FL, USA, Journal of Applied Physics, Vol. 103, 07E731
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(2008): Hard and Soft Magnetic Materials for Electromagnetic Microactuators, Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 14, No. 12, pp. 1949-1954
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(2008): Fabrication of Drive and Guide Components for Micromotors, Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 14, No. 12, pp. 1941-1947
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(2008): Technical Progress in Designing and Controlling of Active Micro Systems, Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 14, No. 12, pp. 1925-1931
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(2008): Temperature Characteristics of a Magnetic Micro Strain Gauge, EUROMAT 2007, Nuremberg, Germany, Symposium A23: Magnetic Thin Films, Physica Status Solidi (c) 5, No. 11, pp. 3551-3554, Wiley-VCH Verlag
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(2007): Increasing Operational Frequency in Microwave Devices by Using [SmCo/NiFe] Multilayered Structures, IEEE Trans. on Magn., Vol. 43, No. 6, pp. 2648-2650
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(2007): Development and Evaluation of an Active Magnetic Guide for Microsystems with an Integrated Air Gap Measurement System, IEEE Trans. on Magn., Vol. 43, No. 6, pp. 2716-2718
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(2007): Carbon Fiber with Magnetoelastic Sensing Capability for Composite Materials, Sensor Letters, Vol. 5, No. 1, pp. 218-221
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(2007): Focused Ion Beam Core Hole Drilling for Stress Detection in Thin-films, MicroNanoReliability 2007, Berlin, Germany, Micromaterials and Nanomaterials, Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 15, No. 1, pp. 151-153
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(2007): Advances in Magnetic Micro Thin-film Transducers, Symposium on Magnetic Materials, Processes and Devices, 210th Meet. of The Electrochemical Society, Cancun, Mexico, 2006, ecs transactions, Vol. 3, Issue 25, pp. 203-221
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(2007): Concept for a Wafer Level Test System for Measuring Magnetic Film Properties, Symposium on Magnetic Materials, Processes and Devices, 210th Meet. of The Electrochemical Society, Cancun, Mexico, 2006, ecs transactions, Vol. 3, Issue 25, pp. 165-177
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(2007): Development of a Recording Head for Magnetic Storage of Information on Machine Components, Symposium on Magnetic Materials, Processes and Devices, 210th Meet. of The Electrochemical Society, Cancun, Mexico, 2006, ecs transactions, Vol. 3, Issue 25, pp. 191-202
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(2007): A Concept for a Toolbox of Components for Modular Magnetic Microsensors, Symposium on Magnetic Materials, Processes and Devices, 210th Meet. of The Electrochemical Society, Cancun, Mexico, 2006, ecs transactions, Vol. 3, Issue 25, pp. 235-246
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(2007): Directional Permeability Dependence in Electroplated Permalloy Layers, Symposium on Magnetic Materials, Processes and Devices, 210th Meet. of The Electrochemical Society, Cancun, Mexico, 2006, ecs transactions, Vol. 3, Issue 25, pp. 123-135
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(2007): Evaluation of a Linear Hybrid Microstep Motor by Means of Magnetic Flux Measurements, 10th Joint MMM/Intermag Conf. 2007, Baltimore, MD, USA, FU-04 IEEE Trans. on Magn., Vol. 43, No. 6, pp. 2588-2590
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(2007): Acoustic Emission (AE) Measurements to Determine the Dynamic Flying Characteristics of Optical Sliders, Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 13, No. 2, pp. 173-175
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(2007): Modularly Designed Magnetoelastic Micro Strain Gauge, 10th Joint MMM/Intermag Conf. 2007, Baltimore, MD, USA, IEEE Trans. on Magn., Vol. 43, No. 6, pp. 2385-2387
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(2006): A Magnetoelastic Microtransformer Based Micro Strain Gauge, 5th European Magnetic Sensor & Actuator Conf. EMSA 2004, Sensors and Actuators A129 (2006) No. 1-2, pp. 41-44
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(2006): Fabrication of Functional Components forEelectromagnetic Microactuators, Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 12, No.7, pp. 670-675
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(2006): Magnetic Levitation Assisted Guide for a Linear Microactuator, IEEE Trans. on Magn., Vol. 42, No. 11, pp. 3785-3787
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(2006): Development of a Linear Micro Inductosyn Sensor, IEEE Trans. on Magn., Vol. 42, No. 10, pp. 2830-2832
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(2006): Microfabricated Inductive Micropositioning Sensor for Measurement of a Linear Movement, IEEE Sensors Journal, Vol. 6, No. 6, pp. 1482-1487
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(2006): Electroplated CoFe Thin Films for Electromagnetic Microactuators, MMM 2005, San Jose, CA, USA, Journal of Applied Physics, Vol. 99, 08M308
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(2006): Development and Fabrication of Magnetic Thin Films, Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 12, No.7, pp. 655-658
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(2006): Design Improvements for a Linear Hybrid Step Micro-actuator, Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 12, No.7, pp. 646-649
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(2006): Fabrication of a Micro Coil for Magneto-Optical Data Storage, IEEE Trans. on Magn., Vol. 42, No. 10, pp. 2468-2470
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(2006): Tribology of Microsystems, Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 12, No.7, pp. 680-684
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(2006): Thin Film SmCo Magnets for use in Electromagnetic Microactuators, MMM 2005, San Jose, CA, USA, Journal of Applied Physics, Vol. 99, 08N304
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(2005): Magnetische Werkstoffe in Mikrosystemen, wt Werkstofftechnik-online, Jahrgang 94, H. 11/12, S. 631-635
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(2005): Thermal Sensor for In-situ Flying Height Measurements of Optical Flying Heads, Tribology International 38, pp. 594-598
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(2005): Thermo-resistive Flight Attitude Measurements of Flying Heads in Near Field Magneto-optical Data Storage, IEEE Trans. on Magn. Vol. 41, No. 10, pp. 2863-2865
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(2005): Slider Vibration Reduction Using Slider Surface Texture., Microsystem Technologies, Vol. 11, No. 8-10, pp. 857-866
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(2004): Write heads with a micro coil for magneto-optical data storage, IEEE Trans. on Magn. Vol. 40, No. 4, pp. 3207-3210
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(2004): Submicron coatings for micro-tribological applications, Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 10, No. 3, pp. 223-226
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(2004): High Aspect Ratio Spiral and Meander Micro Coils for Actuator Applications, HARMST 2003, Monterey, CA, USA, Microsystem Technologies Vol. 10, No. 6-7, pp. 564-567
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(2004): The Influence of Boundary Layer Properties on Grease Lubricated High-Speed Ball Bearing Performance, Transient Processes in Tribology, Tribology Series, 43, Elsevier, Amsterdam, Netherlands, pp. 441-447
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(2004): Magnetic Properties of an SmCo/NiFe System for Magnetic Microactuators, Journal of Magnetism and Magnetic Materials, Vol. 272-276, Part 3
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(2004): An Investigation on Technologies to Fabricate Magnetic Microcomponents for Miniaturized Actuator Systems, Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol.10, No. 3, pp. 237-240
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(2004): Einfluss von Antioxidantien auf die Schmierfettgebrauchsdauer in schnelllaufenden Wälzlagern, Mineralöltechnik, Band 49, Heft 7, Hohenheim, Deutschland, S. 1-18
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(2003): The Application of Chemical-Mechanical Polishing for Planarizing a SU-8/Permalloy Combination Used in MEMS Devices, Sensors & Actuators A: Physical, Vol. 106, No. 1-3, pp. 268-271
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(2003): Flyable Media for Slider Based Ultra High Density Optical Recording, IEE Proc. Science, Measurement and Technology, Vol. 150, No. 5, pp. 203-206
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(2003): Chemical-mechanical Planarization of a SU-8/Copper combination for MEMS, Proc. ASPE 18th Ann. Meet. 2003, Portland, Oregon, USA, Sensors & Actuators A: Physical, Vol. 106, No. 1-3, pp. 268-271
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(2003): Wear of Single Crystal Silicon as a Function of Surface Roughness, Wear, Vol. 254, No. 9, pp. 907-910
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(2003): Investigations on the Friction Force Anisotropy of the Silicon Lattice, Wear, Vol. 254, No. 11, pp. 1122-1126
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(2003): Triological Investigation of Micromachined Silicon Sliders, Tribology Int., Vol. 36, No. 4-6, pp. 279-283
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(2003): Dynamics of Textured Pico-Sliders during Contact Start/Stop, IEEE Trans. on Magn., Vol. 39, No.5, pp. 2426-2428
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(2002): Messen in anderen Dimensionen - Entwicklung, Fertigung und Erprobung eines induktiven Miniatur-Abstandssensors, F&M Messtechnik, Carl Hanser, Munich, Vol. 110, No. 5, pp. 36-40
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(2002): Eddy Current Microsensor Based on Thin - film Technology, IEEE Trans. on Magn., Vol. 38, No. 5, pp. 3368-3370
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(2002): A Linear Microactuator with Enhanced Design, Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 7, No.5-6, pp. 261-264
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(2002): Tribology of Textured Sliders in Near Contact Situations, IEEE Trans. on Magn., Vol. 38, No. 5, pp. 2159-2161
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(2002): Patterned Sputter Deposited SmCo-Films for MEMS Applications, Journal of Magnetism and Magn. Mat., Vol. 242-245
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(2002): Challenges in Using Photosensitive Embedding Material to Planarize Multi-layer Coils for Actuator Systems, Journal of Magnetism and Magn. Mat., Vol. 242-245, pp. 1149-1152
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(2002): Application of UV Depth Lithography and 3D-Microforming for High Aspect Ratio Electromagnetic Microactuator Components, Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 8, No.4-5, pp. 304-307
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(2001): Dicing Challenges in Microelectronics and Micro Electro-Mechanical Systems (MEMS), Microsystem Technologies Vol. 7, pp. 151-154
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(2001): Elektromagnetischer Mikrolinearmotor, Innovative Klein- und Mikroantriebe 2001 (Innovative Miniature and Micro Drives), GMM-Fachbericht 33, VDE-Verlag, Mainz, S.117-121
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(2001): Thinfilm Technologies to Fabricate a Linear Microactuator, Sensors and Actuators A91, No. 1-2, pp. 145-149
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(2000): Rigid Disk Slider Micromachining Challenges to Meet Microtribology Needs, Invited paper, Tribology International, Vol. 33, pp. 347-342
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(2000): Diamond Wear during Precision Grinding of Brittle Materials, Advances in Abrasive Technology III, 2000, Soc. of Grinding Engineers, Tokyo, Japan
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(1999): Anwendung der Mikrotechnologie in der Messtechnik, Technisches Messen, Band 66, Heft 12, S. 476-484
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(1999): Fabrication Considerations when Dicing Silicon Wafers, Materials Mechanics-Fracture Mechanics-Micromechanics 1999, Fraunhofer Institute for Reliability and Microintegration, Berlin
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(1998): Slicing Induced ABS Cambering in Thin Film Picosliders, IEEE Trans. on Magn., Vol. 35, No. 5, pp. 2427-2429
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(1998): Dual Stripe Sensor on a Picoslider for In-Contact Thermal Asperity Testing, IEEE Trans. on Magn., Vol. 34, No. 4, pp. 1702-1704
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(1998): Inductive Microtransformer Exploiting the Magnetoelastic Effect, IEEE Trans. on Magn. Vol. 34, No. 4, pp. 1378-1380
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(1996): Nanogrinding , Proc. ASPE 11th Ann. Meet. 1996, Monterey, California, USA, and J. of the American Society for Precision Engineering, Vol. 21, pp. 134-139
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(1996): Precision Machining of Rigid Disk Head Sliders, Invited paper, IEEE Trans. on Magn., Vol. 32, No. 3, pp. 1843-1849
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(1996): Observations Regarding the Tribological Properties of SiC Sliders Compared to ALTiC Sliders, IEEE Trans. on Magn., Vol. 32, No. 5, pp. 3783-3785
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(1980): Technologie der Schreib-Lese-Köpfe für digitale Magnetschichtspeicher (Technology of Read/Write Heads for Digital Magnetic Storage Devices), Proc. Constronic '80, Budapest, Ungarn, pp. 197-207
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(1980): Schreib-Leseköpfe für Magnetplattenspeicher in konventioneller und Dünnfilm-Technologie. Ein Vergleich in Aufbau, Wirkungsweise und Leistungsmerkmalen (Read/Write Heads for Magnetic Disk Files in Conventional and Thin-Film Technology. A Comparison of Design, Principle, and Specification) , Feinwerktechnik 2, pp. 53-59
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(1980): Sputter Deposited Multilayer Thin-Film Head, IEEE Trans. on Magn., Vol. 16, No. 5, pp. 782-785
Patentschriften
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(2021): Sensorbauteil, Halbzeug, Verfahren zur Anbringung und zur Herstellung eines Sensorbauteils, DE102019122623A1 WO002021032878A1
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(2021): Magnetkopf und Verfahren zur Speicherung von Informationen sowie Erzeugnis, EP000003821431A1
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(2021): Einrichtung mit einem elektrischen Bauteil sowie Verfahren zu deren Herstellung, EP000003817929A1
-
(2020): Verfahren und Anlage zur Herstellung eines elektrischen Bauteils sowie Computerprogramm, EP000003638825A1 WO002018229250A1
-
(2020): Verfahren zur Herstellung eines Formkörpers und Bauteil mit elektrischer Funktionalität, WO002020239463A1 DE102019113973A1
-
(2020): Einrichtung mit einem elektrischen Bauteil sowie Verfahren zu deren Herstellung, WO002020007957A1
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(2019): Verfahren zum Fügen und Einrichtung zum Fügen einer Anordnung unter Verwendung des Verfahrens, DE 10 2014 104 510 B4
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(2019): Verfahren zur Anbringung einer elektrischen Mikrostruktur sowie Elastomerstruktur, Faserverbundbauteil und Reifen, EP000003552464A1 WO002018104047A1
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(2018): Verfahren und Anlage zur Herstellung eines elektrischen Bauteils sowie Computerprogramm, 10 2017 113 212
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(2018): Einrichtung mit einem elektrischen Bauteil sowie Verfahren zu deren Herstellung, DE 10 2018 116 182 A1
-
(2018): Magnetkopf, Verfahren zur Speicherung von Information sowie Erzeugnis, DE 10 2018 116 896 A1
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(2017): Verfahren und Anlage zur Herstellung eines elektrischen Bauteils sowie Computerprogramm, DE 10 2017 113 212 B3
-
(2016): Verfahren zur Anbringung einer elektrischen Mikrostruktur sowie Elastomerstruktur, Faserverbundbauteil und Reifen, DE 10 2016 123 795 A1
-
(2016): Elektrisch betriebener Raucherartikel, Plattform dafür und Verfahren zu dessen Herstellung, DE102014102442B4
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(2016): Verfahren zum Verbinden eines Halbleiterbauelements mit einem Gegenstück sowie Anordnung mit einem Halbleiterbauelement, DE 10 2016 123 180 A1
-
(2016): Elektrisches Bauteil, Konstruktionsbauteil eines technischen Gegenstands sowie Verfahren zu deren Herstellung, DE 10 2015 106 002 A1
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(2015): Verfahren zur Herstellung eines Mikrozerspanwerkzeugs sowie Mikrozerspanwerkzeug, Anmeldung: 24.08.2015, DE, Offenlegungsschrift DE102015113998A1
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(2015): Beschichtungseinrichtung zum zumindest teilweisen Beschichten einer Oberfläche, DE 10 2014 004 323 A1
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(2015): Verfahren und Einrichtung zum fügen von Strukturen auf einem Substrat sowie Anordnung umfassend solcher gefügten Strukturen, Verfahren und Einrichtung zum fügen von Strukturen auf einem Substrat sowie Anordnung umfassend solcher gefügten Strukturen
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(2015): Elektrisch betriebener Raucherartikel, Plattform dafür und Verfahren zu dessen Herstellung, DE 10 2014 102 442 A1
-
(2015): Vorrichtung zum Bestimmen einer Konzentration eines chemischen Stoffes, DE 10 2014 000 651 B3
-
(2010): Elektromagnetisches Mikrosystem zur Manipulation magnetischer Mikro- oder Nanoperlen, DE 102009004086 A1
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(2005): Sensor und Verfahren zum Messen einer Position, eines Weges und/oder einer Bewegungsrichtung, DE 10338578 A1
-
(2003): Microtechnically Produced swiveling platform with magnetic drive and stop positions, US 20050127588 A1
-
(2000): Micromechanical, rotating device with a magnetic drive and method for the production thereof, WO 0247241 A1
Doktorarbeiten
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(2017): Development of Nanocrystalline Soft Magnetic Ni-Fe-W Alloy Films and Implementat, PZH Verlag, Berichte aus dem impt Weitere Informationen
ISBN: 978-3-95900-149-6 -
(2017): Realisierung von AMR-Sensoren auf umgeformten metallischen Substraten, PZH Verlag, Berichte aus dem impt Weitere Informationen
ISBN: 978-3-95900-163-2 -
(2017): Präzisionsbearbeitung bearbeitbarer Festkeramiken im ungebrannten Zustand durch Trennschleifen Weitere Informationen
ISBN: 978-3-95900-127-4 -
(2015): Entwicklung und Fertigung eines Flexleiter-basierten magnetischen Schreibkopfes, Berichte aus dem impt, IMPT 01/2015 Weitere Informationen
ISBN: 978-3-95900004-8 -
(2015): Entwicklung eines Hochtemperatur-Magnetfeldsensors zur Detektion schwacher Felder, Berichte aus dem impt, IMPT 02/2015 Weitere Informationen
ISBN: 978-3-95900-032-1 -
(2015): Elektromagnetischer Mikroaktor zur Erzeugung einer Flüssiglinse, Berichte aus dem impt, IMPT 03/2015
ISBN: 978-3-95900-043-7 -
(2014): Laserbasierte Generierung von Nanokompositmaterialien für medizintechnische Anwendungen, (entstanden in Zusammenarbeit mit dem LZH), Berichte aus dem LZH, Band 04/2014, TEWISS-Technik und Wissen GmbH, Garbsen Weitere Informationen
ISBN: 978-3-944586-75-5 -
(2014): Adaptive Optik für die vitreo-retinale Femtosekundenlaserchirurgie, (entstanden in Zusammenarbeit mit dem LZH), Berichte aus dem LZH, Band 01/2014, TEWISS-Technik und Wissen GmbH, Garbsen Weitere Informationen
ISBN: 978-3-944586-45-8 -
(2013): Plasmonenbasierte Zelltransfektion im Hochdurchsatz mittels ultrakurzer Laserpulse, (entstanden in Zusammenarbeit mit dem LZH), Berichte aus dem LZH, Band 03/2013, TEWISS-Technik und Wissen GmbH, Garbsen Weitere Informationen
ISBN: 978-3-944586-15-1 -
(2013): Technologieentwicklung zur Fertigung von Mikrosensoren auf flexiblen Trägersubstraten, Berichte aus dem impt 01/2013, TEWISS - Technik und Wissen GmbH, Garbsen Weitere Informationen
ISBN: 978-3-944586-40-3
Verschiedenes
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(2022): Berufsfeld Wissenschaft und Technik: Ein erster Einblick nach der Schule, phi - Produktionstechnik Hannover Informiert, Newsletter Nr. 37 / Dezember 2022
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(2022): Herstellung und Evaluierung von Mikroschleifstiften, phi – Produktionstechnik Hannover informiert, Newsletter Nr. 36 / September 2022
DOI: https://doi.org/10.48811/phi-22-013
ISSN: 2198-1922 -
(2022): Entwicklung eines piezoelektrischen Kraftsensor-Arrays, phi - Produktionstechnik Hannover Informiert, Newsletter Nr. 34 / März 2022
DOI: https://doi.org/10.48811/phi-22-002 -
(2022): Drucksensoren aus Glas: IMPT gewinnt „Best Session Paper“, phi - Produktionstechnik Hannover informiert, Newsletter Nr. 36 / September 2022
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(2021): Forscher aus Hannover entwickeln miniaturisierte Quantengravimeter, phi – Produktionstechnik Hannover informiert, Newsletter Nr. 30 / März 2021
DOI: https://doi.org/10.48811/phi-21-003
ISSN: 2198-1922 -
(2021): Entwicklung eines piezoelektrischen Aluminiumnitrid-Dünnfilms, phi - Produktionstechnik Hannover informiert, 2021
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(2021): Zeigt euren MuT: Mädchen und Technik ist wieder da!, phi - Produktionstechnik Hannover informiert
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(2020): Verschleiß-Untersuchung in sauerstofffreier Atmosphäre, phi – Produktionstechnik Hannover informiert, 2020
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(2019): Wasseranalysegerät wird Industrie 4.0-fähig, Digitalisierung erfolgreich umgesetzt, Nr. 2, 2019
ISBN: 978-3-95900-350-6 -
(2019): Geringste Drücke magnetisch messen, phi – Produktionstechnik Hannover informiert, Newsletter Nr. 24 / September 2019
ISSN: 2198-1922 -
(2018): Innovatives Verfahren zur Herstellung von Schleifscheiben, Produktionstechnik Hannover informiert (phi), August 2018
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(2017): Kontaktierung und Kühlung von ungehausten Halbleiterbauteilen auf Kunststofffolien, Uni Magazin Leibniz Uni Hannover (Ausgabe 03/04 2017)
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(2017): „Tire as Sensor“ - Industriekooperation am Institut für Mikroproduktionstechnik (IMPT) mit der Continental Reifen GmbH, Phi - Produktionstechnik Hannover informiert (Ausgabe 4/2017) Weitere Informationen
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(2016): Massenfertigung für Mikrozerspanwerkzeuge, Produktionstechnik Hannover informiert (phi), Newsletter Nr. 11
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(2015): Development of a Magnetic Field Sensor for Temperatures up to 250° C, OIL Gas Magazine, pp. 36-37
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(2015): Schlankheitskur für Sensoren, Produktionstechnik Hannover informiert (phi), Newsletter Nr. 9
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(2015): Custom Lithium Niobate Transducer Arrays for Detecting Material Distribution of Hybrid Workpieces, Energy Harvesting and Systems, Vol. 1
DOI: 10.1515/ehs-2014-0045 -
(2015): Paper-based Spintronics: The whys and wherefores., Magnetics Magazine, Summer Issue 2015, pp. 12-15 Weitere Informationen
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(2015): Analysis of in-Plane Conductivity of La1-xSrxF3-x Superionic Thin Films., Computer Science
DOI: 10.1007/978-3-319-23126-6-73 -
(2010): Simulation of an Improved Microactuator with Discrete MSM Elements, Materials Science Forum Vol. 635, pp. 181-186, Trans Tech Publications, Switzerland
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(2009): Magnetoelastic Carbon Fiber Micro Strain Sensor, IEEE Transaction on Magnetics, Vol. 45, Issue 10, pp. 4522-4525
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(2009): Design, Fabrication and Calibration of Capacitive Air Gap Sensors for Application in Levitation based Guides for Microactuators., Proc. IEEE Sensors 2009, Christchurch, New Zealand, pp. 1915-1918
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(2009): Operating Range Optimization of a Slider with an Integrated Microactuator (SLIM) for Hard Disc Drivers, IEEE Transaction on Magnetics, Vol. 45, Issue 10, pp. 3769-3772
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(2009): Improved Fabrication of an Integrated Electromagnetic Second Stage Microactuator for a Hard Disk Recording Head, Proc. (CD), ASME IMECE 2009, IMECE2009-11076, pp. 1-8, Lake Buena Vista, FL, USA
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(2008): Biomedizinische Anwendungen energieautarker Mikrosysteme, CD 2, Fachveranstaltung Energy Harvesting, Haus der Technik, Essen, Deutschland
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(2008): ANKOM-Projekt "ProfIS" - Professional Improvement by Study in Engineering Sciences, HIS Hochschul-Informations-System GmbH, Forum Hochschule, ISSN 1863-5563, 13/2008, pp. 81-89
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(2008): Electromagnetic Second Stage Microactuator for a Hard Disc Recording Head, Proc. Innovative Mass Storage Technology Workshop (IMST), Leuven, Belgium
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(2008): Investigation of a Thermoplastic Polyurethane Coating on Galvanized Sheet Steel with the Help of Numerical and Experimental Nanoindentation, Proceedings (CD), Numisheet 2008, Interlaken, Switzerland
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(2010): Qualification of Membranes for MEMS Applications Applying Nanoindentation, Nanobrücken / Hysitron User Meeting, pp. 57-58, Saarbrücken, Germany, 2010
