Direct-Deposited Thin-film Strain Gauges for High-temperature Applications
Abstract
Strain gauges play a major role in the mechanical monitoring of processes and sequences in production engineering. They are also used for condition monitoring of components for lifetime prediction and detection of critical load conditions. In this context, strain monitoring in the high-temperature range is particularly relevant for monitoring the mechanical loads of engines, turbines, pipelines or forming equipment, but also for load testing in the aerospace industry. Since conventional strain gauges reach their temperature limits due to their polymer-based substrate and the adhesive, direct-deposited polymer-free strain gauges thus enable precise measurement of the mechanical loads acting on the workpiece. In this article, stainless-steel tensile specimens were sputter coated with alumina for insulation, thin-film Nickel-Chromium (NiCr) for the strain gauges with Tantalum as a high-temperature diffusion barrier and adhesion promoter and finally alumina as a protective layer. With a developed high-temperature contacting, a constant temperature coefficient of resistance of 31 ppm/°C and an increasing k-factor of 1.4 at room temperature and 1.8 at 515 °C were measured. Finally, strain measurements at 515 °C are shown with maximum deviations of 50 µm/m.
Details
- Organisationseinheit(en)
-
Institut für Mikroproduktionstechnik
QUEST Leibniz Forschungsschule
- Typ
- Aufsatz in Konferenzband
- Seiten
- 802-805
- Anzahl der Seiten
- 4
- Publikationsdatum
- 23.10.2023
- Publikationsstatus
- Veröffentlicht
- ASJC Scopus Sachgebiete
- Elektrotechnik und Elektronik, Elektronische, optische und magnetische Materialien, Oberflächen, Beschichtungen und Folien, Physik der kondensierten Materie, Atom- und Molekularphysik sowie Optik
- Elektronische Version(en)
-
https://doi.org/10.15488/18557 (Zugang:
Offen
)
https://ieeexplore.ieee.org/document/10483196 (Zugang: Geschlossen )
