Diamond Coating of Diced Si Field Emitters for Enhanced Field Emission Performance

Verfasst von

Aleksandra Monika Buchta, Evan Lloyd Hunter Thomas, Alexander Kassner, Folke Dencker, Marc Wurz

Abstract

This study characterizes the field emission and heat development properties of polycrystalline diamond (PCD) coatings on diced n-Si field emitters. The emitter chip package consists of a diced field emitter array and a gold-coated glass extraction electrode fabricated using the Selective Laser Etching (SLE) process. In an attempt to ameliorate heat expansion issues observed in uncoated arrays, a thin layer of PCD was incorporated into the system, leveraging the materials potentially high thermal conductivity and low work function. Additionally, a thermography camera was used to characterize the electron source. The experiments confirmed that PCD-coated emitters operate more stably at lower voltages and exhibit significantly lower and more uniform thermal profiles.

Details

Organisationseinheit(en): Quantentechnologien
Institut für Mikroproduktionstechnik
PhoenixD: Simulation, Fabrikation und Anwendung optischer Systeme
Typ: Aufsatz in Konferenzband
Publikationsdatum: 08.07.2025
Publikationsstatus: Veröffentlicht
Peer-reviewed: Ja
ASJC Scopus Sachgebiete: Elektrotechnik und Elektronik, Elektronische, optische und magnetische Materialien, Instrumentierung
Elektronische Version(en): https://doi.org/10.1109/IVNC65669.2025.11120853 (Zugang: Geschlossen )