ResearchPublications
Fabrication of Drive and Guide Components for Micromotors

Fabrication of Drive and Guide Components for Micromotors

Categories Zeitschriften/Aufsätze
Year 2008
Authors M. Feldmann, A. Waldschick, C. Ruffert, H.H. Gatzen, S. Büttgenbach
Published In Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 14, No. 12, pp. 1941-1947