ResearchPublications
Ductile Mode Cutting of Silicon Microparts

Ductile Mode Cutting of Silicon Microparts

Categories Konferenz (reviewed)
Year 1998
Authors T. Hellmold, L.P. Ruhbach, J. Zeadan, H.H. Gatzen
Published In Proc. ASPE Spring Topical Meet. 1998, Monterey, CA, USA