ResearchPublications
Applying Scanning Probe Microscopy to Ultraprecision-Machining

Applying Scanning Probe Microscopy to Ultraprecision-Machining

Categories Konferenz (reviewed)
Year 1997
Authors H.H. Gatzen, J.C. Mätzig, H. Siekmann
Published In Proc. european Workshop on Microtechnology and Scanning Probe Microscopy 1997, Mainz