ResearchPublications
An Electromagnetically Actuated Bi-stable MEMS Optical Microswitch

An Electromagnetically Actuated Bi-stable MEMS Optical Microswitch

Categories Konferenz (reviewed)
Year 2003
Authors H.H. Gatzen, E. Obermeier, T. Kohlmeier, T. Budde, H.D. Ngo, B. Mukhopadhyay, M. Farr
Published In Proc. Transducers 03, Boston, MA, USA, pp. 1514-1517