ResearchPublications
Thick Sputter Deposited NiFe 45/55 Films for Flux Guides In Magnetic MEMS

Thick Sputter Deposited NiFe 45/55 Films for Flux Guides In Magnetic MEMS

Categories Konferenz (reviewed)
Year 2003
Authors T. Budde, H.H. Gatzen
Published In Proc. 16th Soft Magnetic Materials Conf. 2003, Düsseldorf, Germany, pp. 867-872