ResearchPublications
A Linear Microactuator with Enhanced Design

A Linear Microactuator with Enhanced Design

Categories Zeitschriften/Aufsätze
Year 2002
Authors J. Edler, M. Föhse, H.D. Stölting, H.H. Gatzen
Published In Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 7, No.5-6, pp. 261-264