ResearchPublications
Patterned Sputter Deposited SmCo-Films for MEMS Applications

Patterned Sputter Deposited SmCo-Films for MEMS Applications

Categories Zeitschriften/Aufsätze
Year 2002
Authors T. Budde, H.H. Gatzen
Published In Journal of Magnetism and Magn. Mat., Vol. 242-245