ResearchPublications
Challenges in Using Photosensitive Embedding Material to Planarize Multi-layer Coils for Actuator Systems

Challenges in Using Photosensitive Embedding Material to Planarize Multi-layer Coils for Actuator Systems

Categories Zeitschriften/Aufsätze
Year 2002
Authors T. Kohlmeier, H.H. Gatzen
Published In Journal of Magnetism and Magn. Mat., Vol. 242-245, pp. 1149-1152