ResearchPublications
Thinfilm Technologies to Fabricate a Linear Microactuator

Thinfilm Technologies to Fabricate a Linear Microactuator

Categories Zeitschriften/Aufsätze
Year 2001
Authors M. Föhse, T. Kohlmeier, H.H. Gatzen
Published In Sensors and Actuators A91, No. 1-2, pp. 145-149