ResearchPublications
Advances in Dicing Wafers for Micro Electro-Mechanical Systems (MEMS)

Advances in Dicing Wafers for Micro Electro-Mechanical Systems (MEMS)

Categories Konferenz (reviewed)
Year 2000
Authors H.H. Gatzen, C. Morsbach, J. Zeadan
Published In Proc. Micro.tec Conf. 2000, Hanover, VDE Publication, Vol. 2, pp. 621-625