ResearchPublications
Technological Challenges in Ultraprecision Grinding of Flexural Microsensor

Technological Challenges in Ultraprecision Grinding of Flexural Microsensor

Categories Konferenz (reviewed)
Year 1999
Authors H.H. Gatzen, M. Beck, J. Zeadan
Published In Proc. euspen 1st Int. Conf. 1999, Bremen, Germany, Vol. 1, pp. 538-541