ResearchPublications
Alternatives for Fabricating Aerostatic Micro Guides

Alternatives for Fabricating Aerostatic Micro Guides

Categories Konferenz (reviewed)
Year 2007
Authors C. Ruffert, H.H. Gatzen
Published In Proc. Smart Systems Integration 2007, European Conference & Exhibition on integration issues of miniaturized systems – MEMS, MOEMS, ICs and electronic components, Paris, France, pp. 604-607