ResearchPublications
Design Improvements for a Linear Hybrid Step Micro-actuator

Design Improvements for a Linear Hybrid Step Micro-actuator

Categories Zeitschriften/Aufsätze
Year 2006
Authors M. Hahn, R. Gehrking, B. Ponick, H.H. Gatzen
Published In Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 12, No.7, pp. 646-649