ResearchPublications
Fabrication of Functional Components forEelectromagnetic Microactuators

Fabrication of Functional Components forEelectromagnetic Microactuators

Categories Zeitschriften/Aufsätze
Year 2006
Authors C. Ruffert, M. Feldmann, S. Büttgenbach, H.H. Gatzen
Published In Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 12, No.7, pp. 670-675