ResearchPublications
Combining Mechanical Micromachining and Glass Bonding to Fabricate Robust Micro Structures

Combining Mechanical Micromachining and Glass Bonding to Fabricate Robust Micro Structures

Categories Konferenz (reviewed)
Year 2006
Authors K. Halalo, H.H. Gatzen
Published In Proc. EUSPEN 6th Int. Conf. 2006, Baden, Austria