ResearchPublications
Modeling CMP - Investigation of the Chemical Attack on the Mechanical Properties of Bulk Material

Modeling CMP - Investigation of the Chemical Attack on the Mechanical Properties of Bulk Material

Categories Konferenz (reviewed)
Year 2006
Authors H.H. Gatzen, S. Cvetkovic
Published In Proc. EUSPEN 6th Int. Conf. 2006, Baden, Austria