ResearchPublications
Maskless Nonlinear Lithography with Femtosecond Laser Pulses

Maskless Nonlinear Lithography with Femtosecond Laser Pulses

Categories Beiträge in Büchern
Year 2006
Authors J. Koch, E. Fadeeva, M. Engelbrecht, C. Ruffert, H.H. Gatzen, A. Ostendorf, B.N. Chichkov
Published In Applied Physics A: Materials Science & Processing, Springer-Verlag GmbH, A 82, pp. 23-26, ISSN: 0947-8396