ResearchPublications
Submicron coatings for micro-tribological applications

Submicron coatings for micro-tribological applications

Categories Zeitschriften/Aufsätze
Year 2004
Authors R. Bandorf, H. Lüthje, K. Schiffmann, M. Beck, H.H. Gatzen, M. Schmidt, S. Büttgenbach, G. Bräuer
Published In Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 10, No. 3, pp. 223-226