ResearchPublications
An Investigation on Technologies to Fabricate Microcoils for Miniaturized Actuator Systems

An Investigation on Technologies to Fabricate Microcoils for Miniaturized Actuator Systems

Categories Beiträge in Büchern
Year 2004
Authors T. Kohlmeier, V. Seidemann, S. Büttgenbach, H.H. Gatzen
Published In Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol.10, No. 3, pp.175-185