ResearchPublications
Technical Progress in Designing and Controlling of Active Micro Systems

Technical Progress in Designing and Controlling of Active Micro Systems

Categories Zeitschriften/Aufsätze
Year 2008
Authors S. Demmig, R. Gehrking, M. Hahn, K. Wiedmann, B. Ponick, H.H. Gatzen, A. Mertens
Published In Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 14, No. 12, pp. 1925-1931