ResearchPublications
Dicing Process for the Device Separation of a Slider with an Integrated Microactuator (SLIM)

Dicing Process for the Device Separation of a Slider with an Integrated Microactuator (SLIM)

Categories Konferenz (reviewed)
Year 2008
Authors S. Cvetkovic, H. Saalfeld, H.H. Gatzen
Published In Proc. ASPE 23rd Ann. Meet. 2008 and 12th ICPE, Portland, OR, USA, pp. 380-383