ResearchPublications
Focused Ion Beam Core Hole Drilling for Stress Detection in Thin-films

Focused Ion Beam Core Hole Drilling for Stress Detection in Thin-films

Categories Zeitschriften/Aufsätze
Year 2007
Authors H. Gerdes, H.H. Gatzen
Published In MicroNanoReliability 2007, Berlin, Germany, Micromaterials and Nanomaterials, Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 15, No. 1, pp. 151-153