ResearchPublications
Magnetic Micro Electro-Mechanical Systems (MEMS) for Sensor and Actuator Applications

Magnetic Micro Electro-Mechanical Systems (MEMS) for Sensor and Actuator Applications

Categories Konferenz (reviewed)
Year 2008
Authors H.H. Gatzen
Published In PRiME 2008 Meeting, Honolulu, HI, USA, The Electrochemical Society, MA 2008-2, Abs. 2601.pdf