ResearchPublications
Ultra-precision Dicing and Wire Sawing of Silicon Carbide (SiC)

Ultra-precision Dicing and Wire Sawing of Silicon Carbide (SiC)

Categories Zeitschriften/Aufsätze
Year 2011
Authors S. Cvetkovic, C. Morsbach, L. Rissing
Published In “Microelectronic Engineering” Journal (spec. issue), Proc. 36th International Conf. on Micro&Nanoengineering (MNE10), Genoa, Italy, Vol.88, Nr. 9, 2011, pp. 2500-2504