ResearchPublications
Investigations on Silicon Nitride Thin Films Deposited be PECVD

Investigations on Silicon Nitride Thin Films Deposited be PECVD

Categories Konferenz (reviewed)
Year 2011
Authors C. Ruffert, F. Pape, L. Rissing
Published In European Congress and Exhibition on Advanced Materials and Processes (Euromat 2011), Montpellier, France, 2011