ResearchPublications
Slurry Comparison for Chemical-mechanical Polishing (CMP) of Silicon Carbide (SiC)

Slurry Comparison for Chemical-mechanical Polishing (CMP) of Silicon Carbide (SiC)

Categories Konferenz (reviewed)
Year 2012
Authors J. Rittinger, S. Cvetkovic, L. Rissing
Published In Proc. 12th euspen Int. Conf. 2012, Stockholm, Sweden, pp. 145-148