ResearchPublications
Thinning Process Optimization for an Ultra-thin 3D Magnetic Field Sensor

Thinning Process Optimization for an Ultra-thin 3D Magnetic Field Sensor

Categories Konferenz (reviewed)
Year 2012
Authors S. Cvetkovic, R. Kruppe, L. Rissing
Published In Smart Systems Integration (SSI 2012), 6th Int. Conf. & Exhibition, Zurich, Swiss, paper 17
ISBN 978-3-8007-3423-8