ResearchPublications
Integration of Electroplated CoFe in Trench Type Flux Guides for Magnetic MEMS Applications

Integration of Electroplated CoFe in Trench Type Flux Guides for Magnetic MEMS Applications

Categories Konferenz (reviewed)
Year 2012
Authors J. Chen, S. Cvetkovic, L. Rissing
Published In Trans. 222nd ECS Meeting, Honolulu, Hawaii, Vol. 50, No. 10, pp. 157-166