ResearchPublications
Concept for Performance-Enhancement of Ultra-Precision Dicing for Bulk Hard and Brittle Materials in Micro Applications by Laser Dressing

Concept for Performance-Enhancement of Ultra-Precision Dicing for Bulk Hard and Brittle Materials in Micro Applications by Laser Dressing

Categories Konferenz (reviewed)
Year 2012
Authors M. Stompe, P. v. Witzendorff, S. Cvetkovic, A. Moalem, U. Stute, L. Rissing
Published In Microelectronic Engineering Journal (spec. issue), Proc. 37th Int. Conf. on Micro & Nanoeng., Berlin, Germany, Vol. 98, pp. 544-547