ResearchPublications
Ultra-precision Manufacturing of Porcelain-based MEMS

Ultra-precision Manufacturing of Porcelain-based MEMS

Categories Konferenz (reviewed)
Year 2014
Authors M. Stompe, L. Rissing
Published In Proc. 8th Int. Conf. & Exh. on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components, Vienna 2014, Vienna, Austria, pp. 573-577