ResearchPublications
Component Integrated Sensors: Deposition of Thin Insulation Layers on Functional Surfaces

Component Integrated Sensors: Deposition of Thin Insulation Layers on Functional Surfaces

Categories Konferenz (reviewed)
Year 2014
Authors D. Klaas, P. Taptimthong, L. Jogschies, L. Rissing
Published In Procedia Technology, Vol. 15, pp. 114–121
DOI 10.1016/j.protcy.2014.09.062