ResearchPublications
Dicing study for high productive micro production of porcelain-based ceramic for MEMS

Dicing study for high productive micro production of porcelain-based ceramic for MEMS

Categories Konferenz (reviewed)
Year 2013
Authors M. Stompe, S. Cvetkovic, L. Rissing
Published In Proc.13th euspen Int. Conf., Berlin, Germany, pp. 92-95