ResearchPublications
Sputtering of SmCo Thin Films and Integration into a Ferrofluidic Microactuator

Sputtering of SmCo Thin Films and Integration into a Ferrofluidic Microactuator

Categories Konferenz (reviewed)
Year 2011
Authors J. Chen, D. Hoheisel, L. Rissing
Published In IEEE International Magnetics Conf. (Intermag 2011), Taipei, Taiwan, 2011