ResearchPublications
Application of Sacrificial Layers fort he Modular Micro Sensor Fabrication on a Flexible Polymer Substrate

Application of Sacrificial Layers fort he Modular Micro Sensor Fabrication on a Flexible Polymer Substrate

Categories Konferenz (reviewed)
Year 2011
Authors T. Griesbach, M. C. Wurz, L. Rissing
Published In Proc. CD, Sensor + Test Conf. 2011 – Sensor, Opto, IRS2, Nuremberg, Germany
ISBN 978-3-9810993-9-3