ResearchPublications
Considerations on Ultra-thin Substrateless Micro and Nano Systems

Considerations on Ultra-thin Substrateless Micro and Nano Systems

Categories Konferenz (reviewed)
Year 2011
Authors H.H. Gatzen, T. Griesbach, M. C. Wurz, L. Rissing
Published In Proc. ASME2011 & Exp. IMECE2011, Denver, CO, USA, 2011