ResearchPublications
Planarization of Refrigerated Material Composites for MEMS

Planarization of Refrigerated Material Composites for MEMS

Categories Konferenz (reviewed)
Year 2011
Authors S. Cvetkovic, L. Rissing
Published In Proc. 11th euspen Int. Conf. 2011, Como, Italy, pp. 188-191