ResearchPublications
Design, Fabrication and Calibration of Capacitive Air Gap Sensors for Application in Levitation based Guides for Microactuators.

Design, Fabrication and Calibration of Capacitive Air Gap Sensors for Application in Levitation based Guides for Microactuators.

Categories Verschiedenes
Year 2009
Authors B. Denkena, H.H. Gatzen, H. Kayapinar, F. Pape
Published In Proc. IEEE Sensors 2009, Christchurch, New Zealand, pp. 1915-1918