ResearchPublications
Relationship between Removal Rate and Friction Force of a CMP Process for MEMS

Relationship between Removal Rate and Friction Force of a CMP Process for MEMS

Categories Konferenz (reviewed)
Year 2009
Authors S. Cvetkovic, D. Miletic, H.H. Gatzen
Published In Proc. euspen 9th Int. Conf. 2009, San Sebastian, Spain, Vol. 2, pp. 499-502