ResearchPublications
Focused Ion Beam Core Hole Drilling for Stress Detection in Thin-films

Focused Ion Beam Core Hole Drilling for Stress Detection in Thin-films

Categories Beiträge in Büchern
Year 2009
Authors H. Gerdes, H.H. Gatzen
Published In Microsystem Technologies, Springer Verlag Berlin, Heidelberg, New York, Vol. 15, No. 1, pp. 151-153