ResearchPublications
Investigation of Fluidic Additives on the Nanohardness During Polishing

Investigation of Fluidic Additives on the Nanohardness During Polishing

Categories Konferenz (reviewed)
Year 2009
Authors M.C. Wurz, F. Pape, M. Wark, H.H. Gatzen
Published In Proc. WTC 09, Kyoto, Japan, K-331, pp. 698