ResearchPublications
Resistance of Multilayer Diamond-like Carbon (DLC) Coatings for MEMS Applications against Oscillating Wear

Resistance of Multilayer Diamond-like Carbon (DLC) Coatings for MEMS Applications against Oscillating Wear

Categories Konferenz (reviewed)
Year 2009
Authors F. Pape, H.H. Gatzen
Published In Proc. WTC 09, Kyoto, Japan, G-114, pp.112