ResearchPublications
Mikro-Hysteresemesssensor zur Vermessung anisotroper Dünnfilme. Micro Hysteresis Sensor for Measuring Anisotropic Thin-Films

Mikro-Hysteresemesssensor zur Vermessung anisotroper Dünnfilme. Micro Hysteresis Sensor for Measuring Anisotropic Thin-Films

Categories Konferenz (reviewed)
Year 2009
Authors E. Flick, K. Feindt, H.H. Gatzen
Published In Proc. MST-Kongress 2009, Berlin, Deutschland, S. 389-392