ResearchPublications
Evaluation of a Prototype CMP Machine for Improving the Global Planarization by MEMS

Evaluation of a Prototype CMP Machine for Improving the Global Planarization by MEMS

Categories Konferenz (reviewed)
Year 2009
Authors S. Cvetkovic, H.H. Gatzen
Published In Proc. ASPE, 24th Ann. Meet. 2009, Monterey, CA, USA, pp. 315-318