ResearchPublications
Cross Crown Nanogrinding of a Chiplet for a Slider with an integrated Microactuator (SLIM)

Cross Crown Nanogrinding of a Chiplet for a Slider with an integrated Microactuator (SLIM)

Categories Konferenz (reviewed)
Year 2009
Authors H.H. Gatzen, S. Cvetkovic
Published In Proc. ASPE, 24th Ann. Meet. 2009, Monterey, CA, USA, pp. 95