ResearchPublications
Qualification of Membranes for MEMS Applications Applying Nanoindentation

Qualification of Membranes for MEMS Applications Applying Nanoindentation

Year 2010
Authors F. Pape, T. Creutzburg, and H.H Gatzen
Published In Nanobrücken / Hysitron User Meeting, pp. 57-58, Saarbrücken, Germany, 2010