ResearchPublications
Magnetic MEMS

Magnetic MEMS

Categories Konferenz (reviewed)
Year 2014
Authors L. Rissing, A.Belski, T. Creutzburg, T. Griesbach, M. Kaiser, A. Wienecke, M. C. Wurz
Published In Semicon Russia 2014, St. Petersburg, St. Petersburg State Polytechnical University Journal 5 (205), pp. 21-35