ResearchPublications
Direct hot embossing of micro-elements by means of photostructurable polyimide

Direct hot embossing of micro-elements by means of photostructurable polyimide

Categories Zeitschriften/Aufsätze (reviewed)
Year 2016
Authors M. Akin, M. Rezem, M. Rahlves, K. Cromwell, B. Roth, E. Reithmeier, M. Wurz, L. Rissing, H.-J. Maier
Published In Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3)